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sensor

A technology of sensors and angular velocity sensors, applied in the field of sensors

Active Publication Date: 2015-11-25
SILICON SENSING SYST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

and these checks often provide a very limited scope for complete system operation

Method used

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Embodiment Construction

[0008] Such as figure 1 As shown, a MEMS ring structure 1 of an angular velocity sensor comprises an inner portion 2 and an outer portion 3, the edges of which extend around a common axis and thus operate respectively for the driving and sensing elements. A piezoelectric primary driver 4 is provided which causes the sensor to vibrate on a support (not shown). The mount may include a plurality of fixed support beams (not shown) for supporting the sensor and for allowing it to vibrate in response to input from the piezoelectric primary drive in a substantially undamped oscillatory mode. This enables the resonator to move relative to the support in response to the rotational speed of the system including the sensor.

[0009] A detection circuit 5 is provided, to which a series of signals 6 is input from the sensor. The signal output by the sensor comprises a primary sensor signal 6a and a secondary sensor signal 6b and the converter board is arranged so that the signals are in ...

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Abstract

An inertial sensor is described that has a commanded test function. The sensor is of a ring type driven by a driver circuit, the sensor further includes primary and secondary portions having corresponding signal pickoffs. The primary pickoff signal amplitude is controlled via an automatic gain control, the primary phase lock loop and VCO locks to the resonant frequency to provide the clocks for the synchronous detectors, the primary pickoff signals via the primary phase shift circuit is provided to the primary driver, the secondary pickoff signal being input into a detector circuit capable of detecting motion in the sensor. The commanded test function includes a signal derived from the primary portion of the circuit and input into the two inputs of a differential amplifier in the secondary pickoff detector circuit.

Description

technical field [0001] The present invention relates to sensors. More specifically, but not exclusively, it relates to sensors such as inertial sensors with commanded built in test (CBit), eg accelerometers and gyroscopes. Background technique [0002] Various inertial sensors are known. Angular velocity sensors comprising MEMS type rings are known and examples of this can be seen for example in GB2322196. Vibrating planar rings or ring-like structures are disclosed in such angular velocity sensors. The ring-like structure is suspended in space by a suitable support seat for detection of rotational velocity, linear acceleration and angular acceleration. Rotational velocity is sensed by detecting vibrations coupled by Coriolis forces, while linear and angular accelerations are sensed by lateral, longitudinal and rocking motion of the entire ring or ring-like structure in its base. [0003] The ability for a user to indicate a MEMS velocity sensor check has previously been...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01C19/5684
CPCG01P3/14G01C19/5684G01C19/5677
Inventor K·汤森德M·德斯顿D·西奇
Owner SILICON SENSING SYST