sensor
A technology of sensors and angular velocity sensors, applied in the field of sensors
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[0008] Such as figure 1 As shown, a MEMS ring structure 1 of an angular velocity sensor comprises an inner portion 2 and an outer portion 3, the edges of which extend around a common axis and thus operate respectively for the driving and sensing elements. A piezoelectric primary driver 4 is provided which causes the sensor to vibrate on a support (not shown). The mount may include a plurality of fixed support beams (not shown) for supporting the sensor and for allowing it to vibrate in response to input from the piezoelectric primary drive in a substantially undamped oscillatory mode. This enables the resonator to move relative to the support in response to the rotational speed of the system including the sensor.
[0009] A detection circuit 5 is provided, to which a series of signals 6 is input from the sensor. The signal output by the sensor comprises a primary sensor signal 6a and a secondary sensor signal 6b and the converter board is arranged so that the signals are in ...
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