Cryopump control apparatus, cryopump system, and method for monitoring cryopump
A control device, cryopump technology, applied in pump control, pump, axial flow pump, etc., can solve problems such as cryopump failure, adverse effects of manufacturing plans, increased downtime, etc., to achieve the effect of monitoring deterioration
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[0030] First, an outline of an embodiment of the present invention will be described.
[0031] In order to effectively grasp the deterioration status of the cryopump, it is preferable to install a monitoring function or a self-diagnosis function in the cryopump system to monitor the operating state of the cryopump.
[0032] The inventors conceived that by monitoring the operation of the cryopump through regeneration processing performed as part of normal operation of the cryopump, it is possible to monitor the deterioration of the cryopump and accurately grasp the maintenance time.
[0033] figure 1 Regeneration processing 1 and activation processing 2 of the cryopump according to the embodiment are shown.
[0034] Regeneration treatment 1 includes: temperature raising treatment 3, which vaporizes or liquefies the gas accumulated in the cryopump; purification treatment, which introduces purification gas such as nitrogen (hereinafter also referred to as is "purified gas"); Ex...
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