Unlock instant, AI-driven research and patent intelligence for your innovation.

Scanning mode of ultrasonic scanning microscope

A technology of ultrasonic scanning and scanning mode, which is applied in the direction of analyzing solids by using sound wave/ultrasonic wave/infrasonic wave, which can solve the problems of slow speed and low efficiency, and achieve the effect of improving utilization rate and scanning efficiency

Inactive Publication Date: 2013-01-02
SHANGHAI FALAB TEST
View PDF6 Cites 2 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In order to solve the problems of slow speed and low efficiency when the existing ultrasonic scanning microscope scans large quantities of integrated circuit products, the present invention provides the following technical solutions:

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0012] The process embodiment will be described in detail below, so that the advantages and features of the present invention can be more easily understood by those skilled in the art, so as to define the protection scope of the present invention more clearly.

[0013] This embodiment is to scan an integrated chip with three pins. Since the pins of this chip are relatively long, the scanning range only accounts for about one-seventh of the overall area. The specific scanning steps are as follows:

[0014] A. Arrange the batches of three-pin pin chips neatly in the auxiliary pallet, about 500 at a time, and arrange them in a matrix of 10 rows and 50 columns, and fix the auxiliary pallet in the detection slot of the ultrasonic scanning microscope;

[0015] B. Determine the reference point for product scanning, taking the product position in the upper left corner of the auxiliary tray as the reference point;

[0016] C. According to the size of the product, set the horizontal sca...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention provides a scanning mode of an ultrasonic scanning microscope, including following steps: A) arranging orderly a batch of target products in an auxiliary supporting board, arranging in a manner of multi-row multi-column matrix according to the size of the target product, fixing the auxiliary supporting board in a detecting groove of the ultrasonic scanning microscope; B) determining a reference point of product scanning; C) setting parameters of transverse scanning range and longitudinal shift spacing, etc., of the ultrasonic microscope according to the size of the product and testing requirement; D) performing scanning in sequence on the target position of the target product. The invention has the following advantages that: scanning is directly performed at the target position of the product, avoiding time waste on position without requirement for scanning, greatly improving the scanning efficiency of the ultrasonic scanning microscope and also improving the utilization ratio of the ultrasonic scanning microscope to a certain degree.

Description

technical field [0001] The invention relates to a scanning mode of an ultrasonic scanning microscope, in particular to a scanning mode for fast scanning according to a target scanning position of a product. Background technique [0002] Ultrasonic microscope refers to a device that uses the difference in the acoustic properties of samples to generate high-contrast, high-magnification ultrasonic images by means of acoustic imaging. There are absorption ultrasonic microscope, laser scanning ultrasonic microscope and Bougella diffraction imaging ultrasonic microscope. It is used to display the tiny structure inside the dielectric material, and can observe the structure related to the difference in acoustic properties inside the material. In microelectronics, the use of reflective acoustic mirrors can be used for non-destructive observation of different levels of large-scale integrated circuits. Large-scale integrated circuits are often relatively small in size, and a large nu...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): G01N29/06
Inventor 刘学森
Owner SHANGHAI FALAB TEST