Cavity forming method of multi-layered ceramic element
A multi-layer ceramic and cavity technology, applied in the field of multi-layer ceramic components, can solve problems such as layered cracks of multi-layer ceramic components, low product yield, and impact on long-term reliability, so as to eliminate layered cracks and prolong service life , the effect of improving the pass rate
Active Publication Date: 2015-01-14
EAST CHINA INST OF OPTOELECTRONICS INTEGRATEDDEVICE
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Problems solved by technology
When the cavity filler is taken out, the friction between the cavity filler and the ceramic usually causes delamination cracks in the cavity of the multilayer ceramic component, resulting in low product yield and potential impact on long-term reliability
Moreover, the conventional cavity forming method must remove the cavity filling before the element is sintered, so it is impossible to process the built-in cavity of the multilayer ceramic component
Method used
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[0022] The present invention will be further described below in conjunction with the accompanying drawings. The following examples are only used to illustrate the technical solution of the present invention more clearly, but not to limit the protection scope of the present invention.
[0023] The processing process of multilayer ceramic components mainly includes the following parts:
[0024] Casting raw porcelain → processing cavity filling → lamination of multilayer ceramic components → placing cavity filling → lamination → cutting → sintering.
[0025] The specific process is as follows:
[0026] a Tape-cast raw porcelain: according to the requirements of the multi-layer ceramic cavity, the raw porcelain tape with the required thickness is tape-cast, such as figure 1 ;
[0027] b Process the cavity filling: use the above-mentioned raw porcelain tape to laminate and laminate to obtain the green porcelain body with the same depth as the multilayer ceramic cavity, and then ...
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Abstract
The invention relates to a cavity forming method of a multi-layered ceramic element. The method is characterized in that a raw ceramic material capable of generating gas in a sintering process is used for processing a multi-layered ceramic element cavity filler which is filled into a cavity position, and then laminating is carried out; and in a subsequent sintering process, the raw ceramic material is subjected to a chemical reaction to generate gas, and after the gas is exhausted, a cavity is formed. By adopting the method of the invention, layered cracks at the cavity of the multi-layered ceramic element can be eliminated so as to realize the processing of the built-in cavity of the multi-layered ceramic element.
Description
technical field [0001] The invention belongs to the technical field of multilayer ceramic components, and relates to a forming method for machining cavities in multilayer ceramic components. Background technique [0002] The conventional multilayer ceramic component cavity forming method is to use the processing mold to inject silica gel into the mold to make the cavity filler. When the multilayer ceramic is laminated, fill the cavity filler into the cavity for lamination. After lamination The cavity filling is taken out, then cut and sintered. When the cavity filler is taken out, the friction between the cavity filler and the ceramic usually leads to delamination cracks in the cavity of the multilayer ceramic component, resulting in low product yield and potential impact on long-term reliability. Moreover, the conventional cavity forming method must take out the cavity filling before the element is sintered, so the built-in cavity of the multilayer ceramic element cannot b...
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IPC IPC(8): B32B37/00
Inventor 王啸马涛展丙章薛峻杜松
Owner EAST CHINA INST OF OPTOELECTRONICS INTEGRATEDDEVICE