Piezoelectric-liquid-actuated elastic-membrane-position electric feedback two-stage servo valve and control method thereof

A technology of elastic film and servo valve, which is applied in fluid pressure actuators, servo motor components, mechanical equipment, etc., can solve the problems of small and micro-flow control servo valves with poor reliability, and achieve control without dead zone and high reliability , the effect of high-precision adjustment

Active Publication Date: 2013-01-16
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The present invention aims to solve the problem of poor reliability of existing small and micro-flow control servo valves, ther

Method used

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  • Piezoelectric-liquid-actuated elastic-membrane-position electric feedback two-stage servo valve and control method thereof
  • Piezoelectric-liquid-actuated elastic-membrane-position electric feedback two-stage servo valve and control method thereof
  • Piezoelectric-liquid-actuated elastic-membrane-position electric feedback two-stage servo valve and control method thereof

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Experimental program
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specific Embodiment approach 1

[0032] Specific implementation mode one, combination figure 1 In this specific embodiment, a piezoelectric fluid actuated elastic membrane position electrical feedback type two-stage servo valve, which includes a main valve body 1, a pilot valve body 5 and a servo valve controller 10;

[0033] The main valve body 1 is provided with a No. 1 fixed orifice 2, a displacement sensor 11, a No. 2 fixed orifice 12, a slide valve cavity 14 and a No. 5 flow channel f;

[0034] The pilot valve body 5 is provided with a No. 1 variable orifice 6, a No. 2 variable orifice 8, a piezoelectric hydraulic brake elastic membrane assembly 7, a No. 1 runner a, No. 2 runner b, No. 3 runner c and No. 4 runner d;

[0035] The spool valve cavity 14 is built with a No. 1 balance spring 3, a spool valve 4 and a No. 2 balance spring 9; the side wall of the spool valve cavity 14 is provided with a liquid outlet 18, a No. 1 liquid inlet and outlet 19, and a No. 2 liquid inlet and outlet 20. And the liquid inlet 2...

specific Embodiment approach 2

[0047] Specific implementation mode two, combination figure 2 To illustrate this embodiment, this embodiment is a further description of the first embodiment. The piezoelectric hydraulic brake elastic membrane assembly 7 described in this embodiment includes the first elastic mold 7-1 and the first elastic mold fixing frame 7. -2, No. 1 bellows 7-3, first closed cavity 7-4, No. 1 fixing sleeve 7-5, piezoelectric sheet 7-6, No. 2 fixing sleeve 7-8, second closed cavity 7-9, No. 2 bellows 7-10, No. 2 elastic film holder 7-11 and No. 2 elastic mold 7-12;

[0048] The first elastic mold 7-1, the first bellows 7-3, the first fixed sleeve 7-5 and the piezoelectric sheet 7-6 enclose the first closed cavity 7-4; the first elastic mold 7-1 covers the first One end of the bellows 7-3 is connected to the No. 1 bellows 7-3 through the No. 1 elastic mold fixing frame 7-2, and the other end of the No. 1 bellows 7-3 is connected to the piezoelectric through the No. 1 fixing sleeve 7-5. Fixed ...

specific Embodiment approach 3

[0050] Specific implementation mode three, combination Figure 1 to Figure 3 In this embodiment, the piezoelectric liquid actuated elastic membrane position electric feedback type two-stage servo valve control method described in this embodiment is described. The realization process of the method is as follows:

[0051] The spool displacement signal of the spool valve is input from an external input device to the servo valve controller 10, and the servo valve controller 10 generates a current excitation signal according to the displacement signal to the piezoelectric sheet 7-6 of the piezoelectric hydraulic brake elastic membrane assembly 7. Piezoelectric sheet 7-6 undergoes deformation, and its degree of deformation is approximately proportional to the magnitude of the excitation current;

[0052] When the input excitation current is a positive current, the piezoelectric sheet 7-6 will deform in the direction where the first elastic mode 7-1 is located, so that the piezoelectric l...

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Abstract

The invention provides a piezoelectric-liquid-actuated elastic-membrane-position electric feedback two-stage servo valve and a control method thereof and belongs to the field of microfluid control. The servo valve and the control method solve the problem of poor reliability of an existing small flow and micro-flow control servo valve. The piezoelectric-liquid-actuated elastic-membrane-position electric feedback two-stage servo valve comprises a main valve body, a fixing damping hole, a balancing spring, a valve core, a guide valve body, two adjustable orifices, a piezoelectric-liquid-actuated elastic membrane component, a servo valve controller, a displacement sensor, five flow channels and a slide valve cavity. The method includes that the size and the direction of piezoelectric patch deformation are controlled by the aid of size and positive and negative control of piezoelectric patch input current of the piezoelectric-liquid-actuated elastic membrane component, so that the piezoelectric-liquid-actuated elastic membrane component generates small displacement, equivalent liquid resistance of the left adjustable orifice and the right adjustable orifice is changed, and further differential pressure is formed at two ends of the valve core until a displacement feedback signal of the valve core is equal to a given input signal. The servo valve and the method are applicable to small and microfluid control.

Description

Technical field [0001] The invention relates to a piezoelectric liquid actuated elastic membrane position electric feedback type two-stage servo valve and a control method thereof, and belongs to the field of microfluidic control. Background technique [0002] The servo valve in the field of small flow control applications and microfluidic control is an important small and micro flow control element, and its performance is the key to determining high-precision fluid control applications. Existing small and micro flow control servo valves mostly use nozzle flapper type servo valves. Although this servo valve has the advantages of high accuracy and fast response speed, the nozzle processing accuracy is high, the cost is expensive, and there may be high frequency noise in actual work. Calling, which makes the spring tube assembly failure, and poor reliability. In fact, the dynamic characteristics of servo valves used in the field of small and micro flow control are moderate and the...

Claims

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Application Information

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IPC IPC(8): F15B13/02
Inventor 佟志忠李松晶张振曾文
Owner HARBIN INST OF TECH
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