Method for functionalizing a fluid conduit contained in a micromechanical device, a micromechanical device containing the same, and a method for making the same

Abstract

The invention relates to a method for functionalizing a fluid conduit (1b) in a micromechanical device, the walls of which fluid conduit comprise an opaque layer. For this purpose, the invention provides a method for functionalizing a micromechanical device provided with a fluid conduit comprising a peripheral wall (5) having a surface (2) outside the conduit ) and an inner surface (3) defining a space (1b) in which a fluid can circulate, said peripheral wall at least partially comprising a silicon layer (5a). The method comprises the following steps: a) providing a device whose peripheral wall (5) at least partially comprises a silicon layer (5a) at least locally having a thickness (e) greater than 100 nm and less than 200 nm, advantageously 160-180 nm c) at least silanizing the inner surface of said fluid conduit; d) exposing said peripheral wall at a point on said wall having a thickness greater than 100 nm and less than 200 nm, advantageously 160 to 180 nm, while at least silanizing Localized and selective photodeprotection on the inner surface of an optoelectronic device.

Description

technical field [0001] The invention relates to a method for functionalizing one or more fluid conduits covered with an opaque wall, for example made of silicon. The invention also relates to a device comprising fluid conduits which can be functionalized, and also to a method for their production. Background technique [0002] In the following description, the expression "fluid conduit" is understood to mean a tubular structure comprising a peripheral wall laterally delimiting a space in which a fluid can circulate, and comprising an inlet and an outlet. The cross-section of the fluid conduit can be of any shape that is constant or not along the conduit (circular, polygonal, etc.). Capillary, conduit, tubing are all synonyms for the concept of fluid conduit as used in the present invention. [0003] Functionalization of a surface is the operation of fastening one or more molecules of interest to a surface such that it / they retain all or part of its / their properties. Thus,...

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Problems solved by technology

[0016] In conclusion, standard functionalization techniques cannot therefore be considered for local grafting of molecules of interest within closed cavities, especially within fluidic conduits covered with silicon layers or other opaque materials, as can be encountered in micromechanical devices ( e.g. probe)

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