Spectral detection apparatus for residual gas in storage-state vacuum electronic device and detection method

Abstract

The invention discloses a spectral detection apparatus for residual gas in a storage-state vacuum electronic device. The spectral detection apparatus comprises a single-photon counter, a light source, a first rotary platform, a second rotary platform, a detector, a support and a computer, wherein the support is positioned at an outer side of the first rotary platform, the single-photon counter is in fixed connection with the support, a signal output terminal of the single-photon counter is connected with a signal input terminal of the computer, the detector is in fixed connection with the first rotary platform through the support and is communicated with a drift tube nearby a cathode of the vacuum electronic device, the light source is in fixed connection with the second rotary platform, the second rotary platform is connected with the first rotary platform, and distances respectively from the single-photon counter, the light source and the detector to the first rotary platform are equal. The spectral detection apparatus does not destroy the vacuum electronic device when detecting residual gas in the storage-state vacuum electronic device. The invention further discloses a detection method used by the spectral detection apparatus. The method is simple and easily practicable, and detection results of the method are highly accurate.

Description

technical field [0001] The invention relates to the field of detection of residual gas in electronic devices, in particular to a spectral detection device and detection method for residual gas in vacuum electronic devices in a stored state. Background technique [0002] A vacuum electronic device refers to a device that converts one form of electromagnetic energy into another form of electromagnetic energy by means of electrons interacting with an electromagnetic field in a vacuum or gas. It has a vacuum-tight shell and a number of electrodes, the inside of the tube is evacuated, and the residual gas pressure is 10 -4 ~10 -8 Pa. Some are filled with gas of required composition and pressure after pumping out the gas in the tube. Widely used in broadcasting, communication, television, radar, navigation, automatic control, electronic countermeasures, computer terminal display, medical diagnosis and treatment and other fields. [0003] A large number of facts have proved tha...

AI Technical Summary

Problems solved by technology

Using this method has obvious disadvantages. The test instrument is in contact with the vacuum device environment, which changes the structure of the device and affects the detection results of residual gas in the device; the detection of vacuum electronic devices destroys the vacuum environment.

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