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Piezoelectric ceramic and piezoelectric device

一种压电陶瓷、压电元件的技术，应用在层叠型压电元件领域，能够解决提高、不能得到压电特性、晶粒边界的数量减少等问题，达到抑制空隙、环保性能及生态学优异、压电特性优异的效果

Active Publication Date: 2013-06-26
TDK CORPARATION
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0011] In addition, in Patent Document 4, it is described that the piezoelectric characteristics are improved due to the segregation of at least one element of manganese (Mn) and copper (Cu) at the boundary of the crystal grains of the composition, but there is a problem that due to the occurrence of abnormal Grain growth, segregation The number of grain boundaries with manganese (Mn) and copper (Cu) is reduced, and the effect of improving piezoelectric characteristics cannot be obtained

Method used

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  • Piezoelectric ceramic and piezoelectric device
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  • Piezoelectric ceramic and piezoelectric device

Examples

Experimental program
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Effect test

Embodiment 1～3

[0062] (Examples 1-3, Comparative Examples 1-2)

[0063] First, prepare sodium carbonate (Na 2 CO 3 ) powder, potassium carbonate (K 2 CO 3 ) powder, lithium carbonate (Li 2 CO 3 ) powder, niobium oxide (Nb 2 o 5 ) powder, tantalum oxide (Ta 2 o 5 ) powder, barium carbonate (BaCO 3 ) powder, zirconia (ZrO 2 ) powder, strontium carbonate (SrCO 3 ) powder, and manganese carbonate (MnCO 3 ) powder or copper oxide (CuO) powder. After these raw materials were sufficiently dried, the respective raw materials were weighed so that the compositions of the piezoelectric ceramics were those of Examples 1 to 3 and Comparative Examples 1 to 2 shown in Table 1, even though the value of m varied.

[0064] After mixing these raw materials in ethanol using a ball mill, they are fully dried in a constant temperature tank at 80-120°C, press-molded, and pre-fired at 750-1050°C for 1-4 hours. The calcined product was pulverized in ethanol using a ball mill, and then dried again to ob...

Embodiment 4～15

[0072] (Examples 4-15, Comparative Examples 3-14)

[0073] so that the general formula (K 1-x-y-w-v Na x Li y Ba w Sr v ) m (Nb 1-z-u Ta z -Zr u )O 3 ...(1) In addition to weighing each raw material so that the values ​​of x, y, z, w, v, and u change, Examples 4-15 and Comparative Examples were produced in the same manner as Examples 1-3. 3 to 14 samples were evaluated and the results are also shown in Table 1.

[0074] When x, that is, the amount of sodium (Na) is 0.4 to 0.7, when y, that is, the amount of lithium (Li), is 0.02 to 0.1, and when z, that is, the amount of tantalum (Ta) is 0.3 or less, w That is, when the amount of barium (Ba) is 0.01 or less, when v, that is, the amount of strontium (Sr), is 0.04 to 0.07, and when u, that is, the amount of zirconium (Zr), is 0.04 to 0.07, as shown in the table As shown in 1, abnormal grain growth did not occur, and large values ​​were obtained for εr, kr, and d33. However, as shown in Comparative Examples 3 to 14, k...

Embodiment 16～19）

[0076] In addition, the samples of Examples 16 to 18 were produced and evaluated in the same manner as in Examples 1 to 3, except that the amount of manganese oxide (MnO) as an additive was changed. , and the results are also shown in Table 1. In addition, in Example 19, instead of manganese oxide (MnO), copper oxide (CuO) was weighed and added, and samples were produced and evaluated in the same manner as in Examples 1 to 3. Table 1 also shows the results.

[0077]As shown in Example 16, even when manganese oxide (MnO) was not added, as long as the other compositions were within the prescribed ranges, abnormal grain growth was not observed, and εr, kr, and d33 obtained large values. Furthermore, even when the added amount of manganese oxide (MnO) was 1.0% by mass, abnormal grain growth was not observed, and εr, kr, and d33 obtained large values. However, when the addition amount of manganese oxide (MnO) exceeds 1.0 mass % and reaches 1.5 mass %, although abnormal grain growt...

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Abstract

The present invention is intended to solve the problem that abnormal grain growth is prone to occur during the sintering of sodium potassium lithium niobate, and huge crystal grains with particle sizes of several tens of [mu]m or more are formed. In the present invention, a piezoelectric ceramic with environmental friendliness comprising a composition as the main component composed of a composite oxide free from lead (Pb) as a constituent element, and with excellent piezoelectric characteristics such as the relative dielectric constant, the electromechanical coupling factor, and the piezoelectric constant, and a piezoelectric device using the piezoelectric ceramic, are provided. A piezoelectric ceramic comprising a composition represented by the following general formula (1) as the main component, (K 1-x-y-w-v Na x Li y Ba w Sr v ) m (Nb 1-z-u Ta z -Zr u )O 3 (1) (wherein, x, y, z, w, v, u and m in the formula (1) are satisfying the following conditions respectively, 0.4<x<=0.7, 0.02<=y<=0.1, 0<z<=0.3, 0<w <=0.01, 0.04<=v<=0.07, 0.04<=u<=0.07, and 0.95<=m<1.

Description

technical field [0001] The present invention relates to piezoelectric ceramics and piezoelectric elements using the same. Further, in more detail, it relates to a lead-free piezoelectric ceramic, a single-plate piezoelectric element using the same, and a multilayer piezoelectric element such as a multilayer piezoelectric actuator (piezoelectric actuator). Background technique [0002] An actuator using piezoelectric ceramics is an actuator that utilizes a piezoelectric phenomenon in which mechanical strain and stress are generated when an electric field is applied. This actuator can obtain a small amount of displacement with high precision, and has the characteristics of generating a large stress, etc., and is used, for example, for precision machining machinery or positioning of optical devices. As piezoelectric ceramics used for actuators, lead zirconate titanate (PZT), which has excellent piezoelectric characteristics, is most utilized. However, since lead zirconate tit...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B35/495H01L41/187H01L41/083H01L41/22H01L41/39
CPCC04B35/495C04B2235/3201C04B2235/3203C04B2235/3213C04B2235/3215C04B2235/3244H10N30/8542H10N30/50
Inventor 曾根英明东智久古川正仁上田智子
Owner TDK CORPARATION
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