Alignment auxiliary board
An auxiliary plate and alignment hole technology, which is applied in the field of indirect alignment process of mask components, can solve the problem of difficult to capture position images, affect the alignment accuracy of the mask plate and the mask frame, the mask plate 03 and the mask frame 02 Alignment difficulty, etc.
Inactive Publication Date: 2017-02-08
KUN SHAN POWER STENCIL
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Problems solved by technology
[0008] However, when the mask plate is aligned with the mask frame, the position images of A and B are captured by the CCD. The CCD view is from top to bottom, and the position image of A is first captured. If the diameter of B is larger than the diameter of A, the CCD It is difficult to capture the position image of B, which brings difficulty to the alignment of the mask plate 03 and the mask frame 02, so as to affect the alignment accuracy of the mask plate and the mask frame
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[0041] Various preferred embodiments of the invention are discussed below. However, those skilled in the art should understand that the detailed description herein is not intended to limit the protection scope of the present invention, and the present invention can also be realized through the modification of the following embodiments or other equivalent methods.
[0042] The invention relates to an alignment auxiliary plate used for indirect alignment between a mask plate and a mask frame. In one embodiment of the present invention, the size of the alignment auxiliary board can be the same as the size of the mask to be aligned, and the alignment auxiliary board Mark point A 1 The relative position of Mark point A on the board surface with the mask to be aligned can also be the same. In other embodiments, other features of the alignment auxiliary plate can also be the same as the mask plate, for example, the alignment auxiliary plate can have hanging holes with the same size,...
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Abstract
The invention discloses an alignment auxiliary plate used for indirect alignment of a mask plate and a mask frame. Specifically, the alignment auxiliary plate has a same size to that of the mask plate, and includes at least two alignment holes and at least two hanging holes. The alignment holes of the alignment auxiliary plate and the alignment hole of the mask plate have a same relative position, and the diameters of the alignment auxiliary plate alignment holes are equal to that of the alignment hole at a corresponding position on the mask frame. The alignment auxiliary plate is larger than the mask frame in size, the hanging holes on the alignment auxiliary plate can cooperate with hooks on a base station so as to fix the alignment auxiliary plate on the base station. Moreover, the diameters of the alignment holes on the alignment auxiliary plate are larger than that of the alignment hole on the mask plate.
Description
technical field [0001] The invention relates to an alignment auxiliary plate, which is specifically applied to the indirect alignment process of mask components. Background technique [0002] Organic electroluminescent element (OLED) has attracted much attention because of its wide viewing angle, low cost, simple manufacturing process, high resolution and self-luminous light, and is regarded as an emerging application technology for the next generation of flat-panel displays. [0003] In terms of the vacuum evaporation device for manufacturing organic electroluminescent elements, a crucible containing organic materials is provided at the bottom, and a heater for heating and evaporating organic materials is provided outside the crucible. In the vapor deposition apparatus, a chuck disposed opposite to the crucible and a substrate holder for mounting and holding the substrate on the bottom surface of the chuck are provided with an insulating member sandwiching a glass substrate...
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IPC IPC(8): C23C14/04C23C14/24
Inventor 魏志凌高小平郑庆靓
Owner KUN SHAN POWER STENCIL