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Robot system

A robot system and robot technology, applied in the field of robot systems, can solve the problem of longer time for transporting substrates, and achieve the effect of shortening the time

Inactive Publication Date: 2013-07-24
YASKAWA DENKI KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In other words, in the technology described in Japanese Patent Laid-Open Publication No. 2011-159738, the return operation of the hand is not performed when performing the clamping operation and the confirmation of the presence or absence of the substrate, so the time required to carry the substrate becomes longer

Method used

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Embodiment Construction

[0026] Hereinafter, embodiments of the robot system disclosed in the present application will be described in detail with reference to the accompanying drawings. In the embodiments shown below, a case in which the robot includes two hands (ie, an upper hand and a lower hand) is explained as an example, however, the robot may include only one hand. The present invention is not limited to the following embodiments.

[0027] First, refer to figure 1 The configuration of the robot system according to the first embodiment will be explained. figure 1 is a schematic diagram showing the configuration of the robot system according to the first embodiment.

[0028] In the following description, in order to clarify the positional relationship, the X-axis direction, the Y-axis direction, and the Z-axis direction orthogonal to each other are defined. In addition, in the following description, the positive Z-axis direction is vertically upward, and the X-axis direction and the Y-axis dir...

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Abstract

A robot system according to the embodiments includes a robot that includes a hand including a gripping mechanism that grips a thin plate-shaped work and an arm that moves the hand, and a robot control apparatus that controls the robot. The robot control apparatus, when causing the robot to transfer the work at a predetermined work transfer position by controlling the robot, performs a presence / absence confirmation of the work by operating the gripping mechanism while causing the hand to retract after the hand reaches the work transfer position.

Description

technical field [0001] Embodiments discussed herein relate to robotic systems. Background technique [0002] Conventionally, there is known a robot system for carrying a substrate such as a wafer into / out of a processing apparatus in a semiconductor manufacturing process by using a robot such as a horizontal articulated robot. [0003] In such a robot system, as the size and cost of the substrate as an object to be conveyed increases, the importance of safely and reliably conveying the substrate has also increased. Therefore, recently, various techniques for safely and reliably transferring substrates have been proposed. [0004] For example, Japanese Patent Laid-Open Publication No. 2011-159738 discloses a technique for preventing deviation or the like of a substrate during conveyance by providing a gripping mechanism for a robot hand for placing the substrate. [0005] In the technique described in Japanese Patent Laid-Open Publication No. 2011-159738, in order to reliab...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B25J13/08H01L21/677
CPCY10S901/09B25J13/02B25J9/1612Y10S414/136Y10S414/141Y10S901/02Y10S901/14Y10S901/19Y10S901/31B25J9/06B25J13/08B65G49/07
Inventor 木村吉希
Owner YASKAWA DENKI KK