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a sample holder

A sample rack and sample placement rack technology, applied in the field of sample racks, can solve problems such as waste of resources, achieve the effects of saving evaporation materials, satisfying the uniformity and controllability of evaporation rate, and reducing costs

Active Publication Date: 2015-08-05
SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, if it is not for large-scale production, but only for evaporation for some process tests, then still using the same sample rack as for mass production will inevitably cause a waste of resources

Method used

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Embodiment Construction

[0029] The technical solution of the present invention will be further described below with reference to the accompanying drawings and a preferred embodiment.

[0030] see figure 1 , this embodiment provides a sample holder that can adjust the height and angle between the sample and the evaporation source, which includes: a sample placing frame 5 for carrying the sample, and a selected point for adjusting the sample surface. The distance between the evaporation source and the evaporation source A distance adjustment mechanism, and an angle adjustment mechanism for adjusting the included angle between the surface normal of the evaporation source and the connection line between the evaporation source and a selected point on the surface of the sample.

[0031] Further, the aforementioned distance adjustment mechanism can be fixedly connected to the angle adjustment mechanism through a hollow fixing frame 4 , and the aforementioned sample placing frame 5 can be fixedly connected t...

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Abstract

The invention discloses a sample holder. The sample holder comprises a sample holder, a distance adjustment mechanism and an angle adjustment mechanism, wherein the sample holder is used for holding a sample; the distance adjustment mechanism is used for adjusting the distance between a selected point on the surface of the sample and an evaporation source; the angle adjustment mechanism is used for adjusting the included angle between a surface normal line of the evaporation source and a connection line of the evaporation source and the selected point on the surface of the sample; the distance adjustment mechanism is fixedly connected with the angle adjustment mechanism via a hollow fixed frame, and the sample holder is fixedly connected with the hollow fixed frame via the angle adjustment mechanism; the distance adjustment mechanism can be used for adjusting the distance between the sample and the evaporation source, and the stability of the sample in an axial direction via a telescopic mechanism; and the angle adjustment mechanism is used for adjusting an angle value by virtue of the cooperation of a screw and a nut, and the adjusted angle value is displayed by a dial and a graduation pointer. The sample holder disclosed by the invention is simple in structure, can be compatible with an existing evaporation sample holder and an existing film thickness control system, meets requirements on the uniformity and evaporation speed controllability of an evaporation process, saves evaporation materials, and reduces cost.

Description

technical field [0001] The present invention particularly relates to a sample holder with adjustable height and angle, which can be applied to place samples during vacuum evaporation. Background technique [0002] In the modern semiconductor preparation process, the sample holder configured in the production evaporation equipment can evaporate several samples at a time. In order to ensure the uniformity of the evaporated film, generally the distance between the sample and the evaporation source is relatively long, and the distance between the sample and the evaporation source in some equipment can reach about 100cm. However, if it is not for large-scale production, but only for vapor deposition for some process tests, then still using the same sample rack as in large-scale production will inevitably lead to a waste of resources. [0003] Therefore, under the premise of ensuring compatibility with the existing evaporation sample holder and film thickness control system, how ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/50C23C14/24
Inventor 赵德胜张永红黄宏娟张宝顺
Owner SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI