Nozzle baffle and evaporation device

Abstract

The invention relates to the technical field of manufacturing of display devices, and discloses a nozzle flapper and a vapor deposition device, so as to improve the phenomenon of stacking of vapor molecules in a nozzle, reduce the blockage of the nozzle, improve the working efficiency of the vapor deposition device, and save a vapor deposition material. The nozzle flapper provided by the embodiment of the invention comprises a plate-shaped body and guide plates, the plate-shaped body is provided with a plurality of openings, the guide plates are arranged correspondingly to each opening of the plate-shaped body, and the guide plates are connected with the plate-shaped body, and are used for guiding the vapor molecules of the vapor deposition material beyond the vapor deposition scope of the nozzle.

Description

technical field [0001] The invention relates to the technical field of display device manufacturing, in particular to a nozzle baffle and an evaporation device. Background technique [0002] The OLED display screen has the characteristics of wide color gamut and high contrast ratio. Apart from being widely used in display devices such as televisions and computers, it is also gradually applied to mobile terminals such as mobile phones. In the production process of OLED panels, the evaporation of organic materials is an important link. [0003] During the working process of the OLED evaporation device, if it is necessary to suspend the evaporation operation on the substrate, the nozzle baffle is generally used to block the nozzle, so as to prevent the vapor molecules of the evaporation material from evaporating on the substrate. Such as Figure 1a and Figure 1b As shown, the evaporation device includes an evaporation material accommodating chamber 01, a nozzle 02 arranged a...

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Problems solved by technology

[0004] like Figure 1a As shown, when the substrate 05 is evaporated, the mask plate 06 is placed above the nozzle 02, the substrate 05 is placed above the mask plate, the baffle plate 04 is opened, and after the evaporation material is heated to a vapor state, the vapor molecules It is ejected from the mouth of the nozzle 02 in the form of free molecules and attached to the surface of the substrate 05 to form an evaporation pattern; as Figure 1b As shown, when there is no need to evaporate the substrate 05, the baffle 04 is moved above the nozzle 02, so that the vapor molecules cannot diffuse onto the substrate

[0005] In the prior art, due to the limited equipment space, the size of the baffle is generally small. In order to ensure the shielding effect of the baffle, a small distance needs to be kept between the baffle and the nozzle. The technical defect is that this shielding method will cause a large number of The vapor molecules accumulate between the nozzle and the baffle and cannot be discharged quickly, and even cause the nozzle to be blocked, thus affecting the normal operation of the evaporation device

Sometimes, in order to clear the nozzle, it is necessary to clean the evaporation material holding chamber, which will lead to the scrapping of the evaporation material

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