A shielding device, shielding method and evaporation system

Abstract

The invention provides a shielding device, a shielding method thereof and an evaporation system. The shielding device comprises a power mechanism and a shielding mechanism. The power mechanism is used for driving the shielding mechanism to be switched between different positions at the evaporation speed control stage and the evaporation stage. The shielding mechanism is used for shielding an evaporation passageway between an evaporation source and a to-be-evaporated substrate at the evaporation speed control stage and keeping an evaporation passageway between the evaporation source and an evaporation speed sensor opened, and is further used for opening the evaporation passageway between the evaporation source and the to-be-evaporated substrate at the evaporation stage and continuing to keep the evaporation passageway between the evaporation source and the evaporation speed sensor opened. By means of the shielding device, continuity control of evaporation is achieved, the evaporation time is shortened, evaporation materials are saved, and therefore capacity is improved, and cost is reduced; and meanwhile, stability and the yield of evaporation are improved.

Description

technical field [0001] The present invention relates to the field of display technology, in particular to a shielding device, a shielding method and an evaporation system. Background technique [0002] In the field of display technology, the OLED evaporation process needs to control the rate of evaporation materials during the evaporation process. At present, a plurality of evaporation sources are usually arranged in the evaporation chamber of an OLED, and the evaporation material in each evaporation source is used for evaporation to form a functional layer (such as a light-emitting layer, an electron transport layer or a hole layer) of an OLED device. transport layer). A baffle is arranged directly above each evaporation source, the baffle is parallel to the evaporation surface of the evaporation source, and the size of the baffle is just enough to block the evaporation surface of the corresponding evaporation source. [0003] Each evaporation source starts to control the...

AI Technical Summary

Problems solved by technology

This evaporation method not only takes too long for the evaporation time, but often when the rate of the evaporation material is not stable, part of the evaporation material has been evaporated on the substrate to be coated, so that the control of the thickness of the evaporation film on the substrate to be coated is not enough. Accurate, not only wastes evaporation materials, but also affects the quality of the evaporation film layer on the substrate

[0004] The current evaporation process not only makes the yield rate of OLED display devices low, but also greatly increases the cost of OLED display devices, making OLED display devices difficult to replace LCD display devices.

Especially for the G2.5 production line, there are problems such as low production capacity, high material cost, high time accompanying cost, poor repeatability and stability, etc., and these problems have become bottlenecks hindering the development of OLED

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