Long working distance microscopic optical system for vacuum chamber inner observation
A technology of working distance and optical system, applied in optics, microscopes, optical components, etc., can solve the problem of not being able to observe small objects from a distance, and achieve the effect of ensuring energy passing rate, reasonable distribution of optical power, and increasing front working distance.
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[0021] The present invention will be described in further detail below in conjunction with the accompanying drawings.
[0022] Such as figure 1 As shown, the long working distance micro-optical system for observation in the vacuum chamber of the present invention, from the object plane 9 to the image plane 10, is arranged in sequence along the optical axis 11: a window glass 8, a front lens group, and a middle lens group And the rear lens group, the front lens group is composed of the first negative lens 1, the second negative lens 2 and the third positive lens 3; the middle lens group is composed of the fourth negative lens 4, the fifth negative doublet lens group 5 and the sixth negative lens group The doublet lens group 6 is formed, the fifth negative doublet lens group 5 is made up of the fifth positive lens 51 and the fifth negative lens 52, and the sixth negative doublet lens group 6 is made up of the sixth positive lens 61 and the sixth negative lens 62 The rear lens g...
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