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Method and apparatus for measuring physical properties of samples using peak force tapping mode

A sample and instantaneous force technology, applied in the direction of measuring devices, instruments, nanotechnology, etc., can solve the problems of unable to solve the dynamic nature of AFM imaging, time-consuming, not optimal, etc.

Active Publication Date: 2015-11-25
BRUKER NANO INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Although this process works reasonably well for experienced AFM operators, it is inefficient, time-consuming, and often suboptimal
Additionally, it does not account for the dynamic nature of AFM imaging, which typically requires the operator to change certain settings in use or view images, etc. during operation, and go back and rescan those poorly imaged parts of the sample with the adjusted parameter values
Furthermore, the processing can be extremely slow

Method used

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  • Method and apparatus for measuring physical properties of samples using peak force tapping mode
  • Method and apparatus for measuring physical properties of samples using peak force tapping mode
  • Method and apparatus for measuring physical properties of samples using peak force tapping mode

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Embodiment Construction

[0124] A preferred embodiment involves the Peak Force Tapping (PFT) mode of AFM operation, wherein the interaction force between the probe (tip) and sample is monitored and used to control the tip-sample separation with very small forces, without sacrificing scan speed. The technique described here provides high resolution by maintaining low probe tip-sample forces and enables essentially real-time property mapping of the sample surface. Preferred embodiments are inherently stable, thus facilitating long term force control while maintaining the ability to acquire high integrity data (improved resolution). In addition, since no tuning is required, it is different from traditional TappingMode TM AFM, AFM setup is faster and easier than other AFM modes. The key concepts driving the PFT mode are shown graphically and discussed here.

[0125] In practice, there are three main problems to be solved before AFM control using instantaneous interaction forces can be realized. As def...

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Abstract

An improved mode of AFM imaging (Peak Force Tapping (PFT) Mode) uses force as the feedback variable to reduce tip-sample interaction forces while maintaining scan speeds achievable by all existing AFM operating modes. Sample imaging and mechanical property mapping are achieved with improved resolution and high sample throughput, with the mode being workable across varying environments, including gaseous, fluidic and vacuum. Ease of use is facilitated by eliminating the need for an expert user to monitor imaging.

Description

[0001] Cross References to Related Applications [0002] This application claims U.S. Provisional Patent Serial No. 61 / 417,837, filed November 29, 2010, entitled Method and Apparatus of Using Peak Force Tapping Mode to Measure Physical Properties of a Sample, under 35 USC § 1.119(e) (35 U.S. Patent Code § 1.119(e)) application and is also a continuation-in-part of US Patent Application Serial No. 12 / 618,641, filed November 13, 2009, entitled Method and Apparatus of Operating a Scanning Probe Microscope, which in turn claims 2008 under 35 USC § 1.119(e) Priority to U.S. Provisional Patent Application Serial No. 60 / 114,399 filed November 13, 2009. The entire contents of the subject matter of these applications are hereby incorporated by reference. technical field [0003] The present invention relates to Scanning Probe Microscopes (SPM) including Atomic Force Microscopes (AFM), and more particularly to Peak Force Tapping mode using AFM operation as described in the above applic...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01Q60/34
CPCG01Q10/065B82Y35/00G01Q60/32
Inventor 史建胡焰胡水清马骥苏全民
Owner BRUKER NANO INC