Volume pump for liquid

Abstract

The invention discloses a volume pump for liquid. In the invention, the volume pump for liquid is formed in a mode of alternately and continuously carrying out a suction process of supplying the liquid to a pump chamber (3) from a suction passage (9) through a check valve (8) at the suction side and a suction port (6) by enlarging the volume of the pump chamber (3) and a discharge process of feeding the liquid to a discharge passage (9) from the pump chamber (3) through a discharge port (7) and a check valve (10) at the discharge side by reducing the volume of the pump chamber (3); and in a pump for processing the liquid which generates bubbles in the pump chamber (3), the volume pump for liquid is formed in a mode that an upper region of the pump chamber (3) is directly communicated and connected with the discharge passage (9) by a pore passage (14) and the liquid in the pump chamber (3) is enabled to slightly flow towards the discharge passage (9) from the pore passage (14) in the discharge process so as to remove the bubbles in the pump chamber (3) and enable the check valves (8, 10) not to generate the gas locking phenomenon.

Description

Technical field [0001] The present invention relates to positive displacement pumps such as bellows pumps used as liquid delivery pumps in the semiconductor and liquid crystal markets, and in particular to foamable liquids (for example, ozone water, hydrogen peroxide water, etc.) ) and liquids containing bubbles (for example, liquids that generate bubbles due to high temperature, high pressure, cavitation, etc.). Positive displacement pumps for liquids. Background technique [0002] Conventional positive displacement pumps for liquids are generally known to have a pump chamber surrounded by a telescopic bellows and configured to perform a volumetric expansion and contraction operation, a suction port and a discharge port opening in the pump chamber, and a suction port through the suction side. The suction passage connected by the check valve to the suction port and the discharge passage connected to the discharge port via the discharge side check valve alternately and contin...

AI Technical Summary

Problems solved by technology

Therefore, if there are large air bubbles in the pump chamber, the air bubbles are only compressed in the discharge process, the pump chamber is not substantially shrunk, the pressure rise in the pump chamber is not sufficient, and the discharge side check valve does not work properly (the valve core does not move toward the open position). valve position displacement), in addition, in the suction process, only the bubble expands, the pump chamber does not expand substantially, the pressure drop in the pump chamber is insufficient, and the suction side check valve does not work properly (the valve core does not move to the valve open position ) such a so-called air lock phenomenon

In addition, even if the bubbles generated or retained in the pump chamber are small or small in one step, the bubbles will gradually increase and become huge due to repeated steps, and there is a possibility of the above-mentioned air lock phenomenon.

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