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Solid pendulum-bob-type tilt angle sensor

A technology of inclination sensor and solid pendulum, which is applied in the direction of instruments, measuring inclination, measuring devices, etc., can solve the problems of inability to realize automatic measurement, inability to measure circuit integration, insufficient precision, etc., and achieve automatic measurement, low cost, and fast response fast effect

Inactive Publication Date: 2015-07-08
SOUTHEAST UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Round blisters are used for two-dimensional measurement, the accuracy is not enough
Neither of these two levels can be integrated with the measurement circuit, and cannot realize automatic measurement

Method used

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  • Solid pendulum-bob-type tilt angle sensor
  • Solid pendulum-bob-type tilt angle sensor

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Embodiment Construction

[0018] The present invention will be further described below in conjunction with the accompanying drawings.

[0019] Such as figure 1 Shown is a solid pendulum type inclination sensor, including a vertically arranged substrate 1 and a pendulum 9, defining a vertical plane S, and defining a vertical line l in the vertical plane S;

[0020] The pendulum 9 has an integrated structure, including three parts: a circular convex head 11, a hammer handle and a weight, and the pendulum 9 is left-right symmetrical with respect to the central axis of the hammer handle, and the lower edge of the weight is arc-shaped. Note that the circular arc is located in the circle O 1 superior;

[0021] An insulating layer 2 is arranged on the substrate 1, and a top electrode 8, a left electrode 4 and a right electrode 3 are arranged on the insulating layer 2, and the top electrode 8, the left electrode 4, the right electrode 3 and the pendulum 9 is located in the vertical plane S, and the left ele...

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PUM

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Abstract

The invention discloses a solid pendulum-bob-type tilt angle sensor. A pendulum bob is freely suspended on a top electrode, left / right side electrodes are symmetrically arranged under the pendulum bob, the pendulum bob can form two symmetrical capacitors by the top electrode and the left / right side electrodes respectively, when the sensor inclines, the variation tendencies of two capacitors are opposite, and differential capacitances are measured to reflect the size of the tilt angle. The solid pendulum-bob-type tilt angle sensor provided by the invention has simple structure, small volume, convenience in installation, low cost, no temperature drifting and capability of integrating with an integrated circuit.

Description

technical field [0001] The invention relates to a solid pendulum type inclination sensor, which is an inclination sensor structure with rotating parts manufactured on the basis of micromachining technology. Background technique [0002] The application of inclination sensor can be seen everywhere in life, such as construction, engineering and various experiments. The earliest application is the water bubble type inclination sensor, also known as the level meter, which is mostly used in construction. There are two types of vesicular structures: long vesicles and round vesicles. Long blisters are mainly used for one-dimensional measurement with high precision, and two vertical ones are used for two-dimensional measurement, which takes up a lot of space. Round blisters are used for two-dimensional measurement, and the precision is not enough. Neither of these two levels can be integrated with the measuring circuit, and cannot realize automatic measurement. The composition o...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01C9/12
CPCG01C9/14
Inventor 秦明朱阿娟高迪
Owner SOUTHEAST UNIV