A piezoresistive integrated three-dimensional turning force sensor

Abstract

The invention relates to a piezoresistive integrated three-dimensional turning force sensor. A turning tool is installed in a head turning tool slot of a sensor main structure, a first vertical octagonal semi-ring and a second vertical octagonal semi-ring are arranged on an upper surface and a lower surface of a middle portion of the sensor main structure respectively, a front side and a rear side of the middle portion of the sensor major structure are connected with a first horizontal octagonal semi-ring and a second horizontal octagonal semi-ring respectively, a tail portion of the sensor major structure is provided with a sensor handle, and a micro-electromechanical system (MEMS) silicon micro force sensor chip is packaged on an outer surface of the octagonal semi-ring. According to the piezoresistive integrated three-dimensional turning force sensor, two octagonal ring structures which are perpendicular to each other are used so that independent measurement of three-dimensional turning forces is achieved, and interaction influence and coupling among effective lateral forces are reduced; the MEMS silicon micro force sensor chip is used, so that measurement accuracy and sensitivity of the chip are greatly improved, and measurement of stress and stain can be achieved by only packaging the MEMS silicon micro force sensor chip in one place; accurate measurement of three-dimensional turning forces is achieved, and both dynamic forces and static forces can be measured.

Description

Technical field [0001] The invention relates to the technical field of intelligent manufacturing equipment, in particular to a piezoresistive integrated three-dimensional turning force sensor. Background technique [0002] In metal cutting processing, turning processing is one of the most common processing methods. Turning force is an important indicator that reflects the turning process. The size of the turning force is closely related to the changes in the turning process. Every small change in the turning state can be reflected by the change of the turning force. Turning force is closely related to tool wear, machining accuracy, turning temperature, power consumption, etc. Therefore, how to accurately measure turning force is very important to improve machining performance. [0003] Traditional turning force dynamometers mainly include resistance strain type, piezoelectric type, current type, optical fiber type, capacitive type, etc., but the resistance strain type dynamometer ...

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Problems solved by technology

[0003] Traditional turning force dynamometers mainly include resistance strain type, piezoelectric type, current type, optical fiber type, capacitive type, etc., but there is a contradiction between sensitivity and stiffness in resistance strain type dynamometers; The static force cannot be tested due to leakage, the increase of the natural frequency is limited by the contact stiffness of the assembly, the maintenance is extremely inconvenient, and the price is expensive; the measurement accuracy of the current type dynamometer is not high, and due to the current hysteresis, it cannot meet the comparative requirements for real-time monitoring of the turning force. High requirements; fiber optic and capacitive sensors are susceptible to external vibration and temperature changes and cannot be measured accurately

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