Three-axis piezoresistive acceleration sensor based on dual-circuit cyclic bridge detection
An acceleration sensor and bridge detection technology, applied in the field of MEMS sensors, can solve the problems of high lateral coupling and low detection sensitivity
Inactive Publication Date: 2015-11-18
ZHONGBEI UNIV
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Problems solved by technology
The existing three-axis piezoresistive acceleration sensor usually uses at least 12 piezoresistors to detect the output signal, and every 4 of them are connected into a Wheatstone bridge to detect the output signal in one direction. The three-axis piezoresistive acceleration sensor of this detection method has low detection sensitivity and high lateral coupling
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[0023] The present invention will be further described below in conjunction with accompanying drawing:
[0024] Such as Figure 1 to Figure 4 As shown, a three-axis piezoresistive acceleration sensor based on dual-circuit cyclic bridge detection includes a supporting frame 1, an elastic cantilever beam 2, and a central mass 3 suspended at the center of the supporting frame 1 through the elastic cantilever beam 2, The four sides of the central mass 3 are respectively fixed to the supporting frame 1 by two parallel elastic cantilever beams 2, the lower surface of the supporting frame 1 exceeds the lower surface of the central mass 3, and the lower surface of the supporting frame 1 passes through a silicon-silicon bond The silicon base is bonded with silicon base, and the eight elastic cantilever beams 2 connecting the supporting frame 1 and the central mass 3 are symmetrically and evenly distributed with sixteen strain varistors with equal resistance: R X11 , R X12 , R X13 , ...
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The invention discloses a tri-axial piezoresistive type acceleration sensor based on double-circuit cyclic electric bridge detection. The detecting method of the sensor breaks through a unidirectional detection rule that a common tri-axial piezoresistive type acceleration sensor at least uses 12 piezoresistors, and every 4 piezoresistors are connected to form a Wheatstone electric bridge to detect a direction output signal, and a cyclic electric bridge detecting method for detecting output signals in three directions of the tri-axial acceleration sensors in real time is disclosed; the cyclic detecting electric bridge consists of shared bridge arms of the 8 piezoresistors. Compared with the double-circuit cyclic electric bridge detecting method of the sensor disclosed by the invention and the unidirectional detecting method of the common sensor, the double-circuit cyclic electric bridge detecting method has the advantages that the sensitivity of the tri-axial acceleration sensor is effectively improved; meanwhile, transverse coupling of the tri-axial acceleration sensor is lowered.
Description
technical field [0001] The invention relates to a MEMS sensor, in particular to a three-axis piezoresistive acceleration sensor based on double-circuit loop bridge detection. Background technique [0002] Silicon micromechanical sensors based on MEMS technology are favored by people for their small size, light weight, strong radiation resistance, and easy mass production. In particular, silicon micro-acceleration sensors, as an inertial device, have been widely used in daily life fields such as aerospace, automatic control, vibration testing, biology, chemistry and medical analysis. [0003] Silicon micromachined acceleration sensors are divided into piezoresistive, piezoelectric, capacitive, etc. due to their different sensitive mechanisms. Among them, piezoresistive acceleration sensors have the advantages of small nonlinearity, low power consumption, and simple structure, which are of great importance to researchers. Attractive, but its sensitivity is not as high as that...
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IPC IPC(8): G01P15/12G01P15/18
Inventor 张文栋何常德张娟婷张国军薛晨阳熊继军刘俊杜春晖张永平
Owner ZHONGBEI UNIV