Substrate conveying device
A technology for conveying devices and substrates, which is used in transportation and packaging, conveyor objects, furnaces, etc., and can solve the problems of increased pressure on the drive unit, equipment downtime, and increased weight of the substrate transmission unit.
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[0031] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present invention.
[0032] An embodiment of the present invention provides a substrate transfer device, including: a substrate transfer unit, which is placed in a horizontal direction, one end in the horizontal direction is a hinged end, and the other end is a free end; a support unit is located below the substrate transfer unit , And fixed; a driving unit, which is connected with the substrate transmission unit, and is used to drive the substrate transmissi...
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