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Laser divergence angle and spot shape measuring device

A measurement device and laser technology, applied in the field of lasers, can solve the problems of time waste, complexity, and long measurement optical path distance, and achieve the effects of increasing accuracy and comparability, reducing space constraints, and saving measurement time.

Active Publication Date: 2016-02-10
RAINBOW SOURCE LASER RSLASER
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Problems solved by technology

[0003] Traditional measurement methods generally measure only one parameter at a time, and cannot simultaneously measure the values ​​and interrelationships of several parameters of the laser at a certain moment
And for some parameters (such as divergence angle), the measurement optical distance is longer and more complicated, which increases the measurement difficulty and measurement error, and also causes a waste of time

Method used

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  • Laser divergence angle and spot shape measuring device
  • Laser divergence angle and spot shape measuring device
  • Laser divergence angle and spot shape measuring device

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Embodiment Construction

[0016] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0017] The device and optical path used in traditional laser divergence angle and spot shape measurement methods are as follows: figure 1 shown. The traditional laser divergence angle and spot shape measurement device includes: a laser 1 , a first attenuation sheet 2 , a focusing lens 3 , a second attenuation sheet 9 and a beam quality analyzer 4 . The principle is that the output light of the laser 1 passes through the first attenuating sheet 2 and then focuses through the focusing lens 3 , then passes through the second attenuating sheet 9 and enters the beam quality analyzer 4 placed at the focal point of the focusing lens 3 . Obtaining the divergence angle of the light and the shape parameters of the light spot by us...

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Abstract

The invention provides a device for measuring parameters of a laser device. The device adopts a plurality of 45-degree total-reflection mirrors to expand a light path in a two-dimensional direction; the straight-line distance between two ends of the light path in the measuring device is shortened; thus the device is compact and the measured data is accurate. The 45-degree mirrors can be used simultaneously to measure any parameter of the laser device. The device provided by the invention has real-time performance, and can save much testing time.

Description

technical field [0001] The invention belongs to the technical field of lasers, and in particular relates to a parameter measurement device of a laser system, in particular to a laser divergence angle and light spot shape measurement device, which is especially suitable for excimer lasers. Background technique [0002] During the development and use of the laser, it is necessary to measure various parameters of the laser (output energy, output energy stability, center wavelength, pulse width, line width, divergence angle, spot quality, etc.) to determine the laser's work. status and performance. [0003] Traditional measurement methods generally only measure one parameter at a time, and cannot measure the values ​​and interrelationships of several parameters of the laser at a certain moment at the same time. And for some parameters (such as divergence angle), the measurement optical path distance is relatively long and complicated, which increases the measurement difficulty ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01M11/02
Inventor 沙鹏飞宋兴亮赵江山李慧彭卓君鲍洋周翊王宇
Owner RAINBOW SOURCE LASER RSLASER