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Helium ionized gas chromatographic analyzer for analyzing trace impurities in high-purity germane gas

A gas chromatograph and trace impurity technology, which is applied in the field of helium ionization gas chromatograph and detection equipment for the analysis of trace impurities in high-purity germane gas, to achieve the effect of realizing automation, always reliable operation, and ensuring safety

Inactive Publication Date: 2014-03-26
SHANGHAI HUAAI CHROMATOGRAPHIC ANALYSIS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Due to the lack of relevant detection methods, domestic users have blind spots in the quality control of imported germane gas

Method used

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  • Helium ionized gas chromatographic analyzer for analyzing trace impurities in high-purity germane gas
  • Helium ionized gas chromatographic analyzer for analyzing trace impurities in high-purity germane gas
  • Helium ionized gas chromatographic analyzer for analyzing trace impurities in high-purity germane gas

Examples

Experimental program
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Effect test

Embodiment

[0044] Analysis of impurities in high-purity germane gas (99.999%).

[0045] The implementation process is as follows: the high-purity germane gas in the first switching valve of the present invention's automatic sampling, the first carrier gas path in series with the 0.5ml quantitative tube enters the first Hayesep Q chromatographic column 14, and the H 2 , N 2 , O 2 +Ar, CO, CH 4 Enter the 5A molecular sieve chromatographic column 15, switch the first switching valve 1 and the second switching valve 2 at this time, and separate CO into the second Hayesep Q chromatographic column 16; at this time, the carrier gas in the first carrier gas circuit 11 carries H 2 , O 2 +Ar,N 2 、CH 4 The 5A molecular sieve chromatographic column 15 enters the helium ionization detector successively, and when the CH 4 Switch the third switching valve 3 after the peak, cut and control the flow of the gas path at precise time so that the carrier gas in the third carrier gas path 13 carries CO ...

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Abstract

The invention relates to a helium ionized gas chromatographic analyzer for analyzing trace impurities in high-purity germane gas. The helium ionized gas chromatographic analyzer is characterized in that the helium ionized gas chromatographic analyzer comprises a chromatographic column oven, a temperature control system, a signal acquiring and processing system and a tail gas treatment system, wherein the signal acquiring and processing system comprises a helium ionized detector and a chromatographic column workstation, the temperature control system can achieve independent temperature control of all chromatographic columns and the detector and controls the temperature of the chromatographic columns to rise according to the time program, and the chromatographic column workstation comprises three switching valves (including one ten-way valve and two six-way valves), three chromatographic columns, four needle valves and three carrier gas paths, and the helium ionized detector is connected with the line of the chromatographic column workstation. The helium ionized gas chromatographic analyzer is used for analyzing trace impurities in high-purity germane gas, can achieve ppb-level impurity analysis through high sensitivity of the helium ionized detector and realizes total analysis of the germane impurities through once sampling.

Description

technical field [0001] The invention relates to a gas chromatograph, and in particular discloses a helium ionization gas chromatograph for trace impurity analysis, which utilizes the high sensitivity of a helium ion detector to detect ppb-level impurities in germane, and is a method for analyzing high-purity germanium Detection equipment for trace impurity analysis in alkane gas. Background technique [0002] Germane is a colorless and highly toxic gas with an unpleasant and irritating odor at normal temperature and pressure. As an important gas used in the electronics industry, it is mainly used as a raw material gas for the epitaxial growth of germanium-silicon thin films in the manufacturing process of semiconductor materials. Its purity is directly It is related to the quality of finished semiconductor devices. With the development of the domestic electronics industry, germane is used more and more widely, and there are more and more domestic units producing and using g...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N30/02G01N30/20G01N30/60
Inventor 庄鸿涛郁光方华
Owner SHANGHAI HUAAI CHROMATOGRAPHIC ANALYSIS
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