Wave filter and manufacture method thereof

A manufacturing method and filter technology, applied in impedance networks, electrical components, multi-terminal pair networks, etc., can solve problems such as excessive variation range and low filter yield, and achieve the effect of improving production yield
CN103701425AActive Publication Date: 2014-04-02ROFS MICROSYST TIANJIN CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
ROFS MICROSYST TIANJIN CO LTD
Publication Date
2014-04-02

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Abstract

The invention discloses a wave filter and a manufacture method thereof. The wave filter comprises series resonators and parallel resonators, where at least one series resonator comprises mass load; at least one parallel resonator comprises mass load; and the material of the mass load of the series resonator is different from that of the mass load of the parallel resonator. As the material of the mass load of the series resonator is different from that of the mass load of the parallel resonator, M values are scarcely influenced by the thickness of a covering layer, therefore, the rangeability of the M values on a whole wafer is controlled, and further the yield rate is improved.
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Description

technical field

[0001] The present invention relates to the field of semiconductors, and in particular, to a filter and a manufacturing method thereof. Background technique

[0002] Wireless broadband communication has always been the focus of attention, but the existing frequency resources are very limited, high-quality frequency bands have been occupied, and new applications are forced to use other noisy and scattered frequency bands. In order to reduce the interference between different operating frequency bands, RF filters that can provide low passband insertion loss, high stopband rejection, steep roll-off, and small passband ripple are widely used in wireless communications. A radio frequency filter can consist of several resonators coupled electrically or in other ways. Film Bulk Acoustic Resonator (FBAR) has high Q value, high operating frequency, high power capacity, strong anti-static discharge (Electro-Static Discharge, ESD) ability, and is mainly used in the man...

Claims

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