Method for controlling instruction execution of semiconductor technology

Abstract

The invention discloses a method for controlling instruction execution of a semiconductor technology. The method includes the steps of establishing instruction objects corresponding to instructions and state objects corresponding to the instructions, wherein instruction information of the instructions corresponding to the instruction objects is stored in the instruction objects, and state information of the instructions corresponding to the state objects is stored in the state objects and comprises instruction completion conditions and instruction execution states; receiving the instructions sent by an upper computer, controlling a semiconductor device to execute the instructions according to the instruction information stored in the instruction objects corresponding to the instructions, updating the instruction execution states in the state objects when the instruction completion conditions stored in the state objects corresponding to the instructions are met, and when the instruction execution states are updated, outputting the updated instruction execution states to the upper computer. According to the method, multithreading execution of the instructions and feedback of the execution states can be achieved.

Description

technical field [0001] The invention relates to the technical field of semiconductor process equipment control, in particular to a control method for command execution. Background technique [0002] At present, the communication between the upper computer and the lower computer in the semiconductor process is realized by the upper computer sending instructions to the lower computer, and the lower computer returning the status to the upper computer. A common method of driving instruction execution adopts a sequential structure design, that is, only one instruction can be executed or a status can be returned at a time, and the instruction information of the next instruction is read after completing one instruction. In addition, all command information and status information are stored in the driver module, resulting in long response time and low efficiency of the driver program. At the same time, the configuration of command information and status information can only be modif...

AI Technical Summary

Problems solved by technology

In addition, all command information and status information are stored in the driver module, resulting in long response time and low efficiency of the driver program. At the same time, the configuration of command information and status information can only be modified in the driver program, which is very cumbersome and not conducive to expansion.

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