Self rotation device for vacuum cavity

Abstract

The invention discloses a self rotation device for a vacuum cavity. The self rotation device comprises a rotation tray, a casing and a spiral clockwork spring, an internal and outer inclined tooth gear, a directional rotation fork and a rotating shaft, wherein the internal and outer inclined tooth gear is an annular wheel, internal and external inclined teeth are respectively arranged on the inner and outer side surfaces of the annular wheel, the inclination directions of the internal and external inclined teeth are opposite, the upper end of the rotating shaft is fixedly arranged on the rotation tray, the lower end of the rotating shaft sequentially passes through the internal and external inclined tooth gear, the clockwork spring and a case, the directional rotation fork comprises a plurality of stop parts, the center of the directional rotation fork is fixed onto the rotating shaft, the tail ends of the stop parts are respectively butted with the internal inclined teeth, the internal end of the spiral clockwork spring is fixedly arranged on the rotating shaft, the outer end of the spiral clockwork spring is fixedly arranged on the casing, a plurality of pallets are arranged on the inner side surface of the casing, and the tail ends of the pallets are butted with the external inclined teeth. The self rotation device for the vacuum cavity has the advantages that the structure is simple, and in addition, the rotation smoothness and the airtightness requirement during the rotation can be met.

Description

technical field [0001] The invention belongs to the field of vacuum equipment, and relates to a self-rotating device used in a poisonous, harmful and corrosive gas-tight cavity, in particular to a self-rotating device for a vacuum cavity. Background technique [0002] Vacuum chambers generally need to be equipped with rotating devices, especially in semiconductor and microelectronic vacuum equipment, it is necessary to take into account the high requirements for uniformity and airtightness of the vacuum chamber in the process. The rotating devices of existing equipment are all made of The rotating motor drives the transmission shaft to provide a rotating power source for the inside of the vacuum cavity. This method has high requirements on the rotary seal between the rotary shaft and the vacuum cavity, which must not only rotate smoothly but also ensure the sealing performance during rotation, and prevent the seal from being worn after long-term rotation. [0003] There are...

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Problems solved by technology

However, the magnetic fluid sealing device is expensive, has a complex structure and is cumbersome to replace and install

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