High energy electronic gun

Abstract

The invention discloses a high energy electronic gun which comprises an electronic emitting mechanism, a focusing mechanism, a deflection mechanism, a differential vacuumizing maintaining mechanism and an electrode adjusting mechanism. Due to the fact that the differential vacuumizing maintaining mechanism is adopted, and with the combination of the characteristic of anode structure, a high vacuum degree of a control electrode can be kept in space. Due to the fact the size of small holes of a small anode hole and an electron beam outlet is very small, the gas communication rate between two cavities of inner space of a vacuum chamber and a control electrode round tube is very small, differential vacuuming is feasible, the service life of a cathode filament is prolonged, and the service life of the whole high energy electronic gun is further prolonged. According to the high energy electronic gun, focusing of an electron beam is achieved by changing the magnitude of current of a hollow core coil in a focusing mechanism and further changing the magnetic field intensity inside the hollow core oil, so that the size of a beam spot of the electron beam is adjusted. The position of the beam spot of the electron beam is adjusted by changing the magnitude of the current in the annular coil in the deflection mechanism.

Description

technical field [0001] The invention relates to a device for emitting, focusing and scanning high-energy electrons, in particular to a high-energy electron gun. Background technique [0002] Atoms on the solid surface will show a series of different physical and chemical properties due to the loss of the periodicity of the bulk atoms, which has attracted people's attention, thus forming an important branch of the field of condensed matter physics-surface science. Surface science plays an important role in the analysis of new materials and nanotechnology. The arrangement and motion state of surface atoms are the main content of surface science. Typical surface analysis instruments include electron microscope (TEM), Auger electron spectroscopy (AES), high energy electron diffraction (RHEED), etc. The core of these instruments is the electron gun (E-gun). At present, the basic structure of the electron gun consists of three parts: the cathode, the anode and the control electro...

AI Technical Summary

Problems solved by technology

At present, the basic structure of the electron gun is the cathode, the anode and the control electrode. Although the purpose of electron emission is achieved, the structure is simple, the electron energy is low, and there is no focusing and deflection mechanism for the electron beam. It is difficult to realize the size and position of the electron beam spot. Adjustment

In addition, in order to maintain the life of the electron emission filament, the use environment requires ultra-high vacuum, which greatly limits the use of electron guns in special environments

At the same time, the materials used in traditional electron guns cannot meet the requirements of high-temperature baking, which also limits the use of electron guns in conjunction with vacuum chambers or other vacuum equipment.

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