Charged particle beam trajectory control device

Abstract

The invention provides a charged particle beam trajectory control device and relates to an electronic ion optical device. The charged particle beam trajectory control device is provided with an electrode fixing plate, an upper insulating plate, a lower insulating plate, an upper electrode plate array, a lower electrode plate array and a voltage divider resistor. The upper insulating plate and the lower insulating plate are respectively fixed on the upper and lower faces of the electrode fixing plate and specularly and symmetrically installed. The upper electrode plate array and the lower electrode plate array on the upper insulating plate and the lower insulating plate in the charged particle flying direction form two rows of electrode plates which are distributed and arranged at intervals. The electrode plates on the upper electrode plate array and the lower electrode plate array have different potentials through voltage dividing of the voltage divider resistor. The charged particle beam trajectory control device is not influenced by the charged particle positions, and charged particles spacing the electrode plates for different distances deflect at the same angle. The charged particles reach to designated positions according to predetermined trajectories by adjusting appropriate electric parameters. The angular divergence problem of a charged particle beam is solved fundamentally.

Description

technical field [0001] The invention relates to electron ion optical equipment, in particular to a charged particle beam trajectory control device. Background technique [0002] Electron ion optical system is a device that controls the movement of electrons and ions in the electromagnetic field and the focusing, imaging and deflection of electrons and ion beams in the electromagnetic field. Its theoretical basis is that charged particles will be affected by Coulomb force (in the electric field) and Lorentz force in the electromagnetic field, which produces an effect similar to that of an engineering optical system, and realizes the focusing, divergence and direction control of charged particles. Electron and ion optics are widely used in many disciplines such as radio electronics, electron and ion microscopy, mass spectrometry, solid state and surface physics, materials science, high energy accelerator physics and plasma physics. Common electronic ion optical devices includ...

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Problems solved by technology

image 3 It can be seen from the simulation diagram of ion trajectories in the Y direction that although this flat-plate trajectory control device is simple in structure, it only consists of electrode fixing plate 7, upper electrode plate 8 and lower electrode plate 9, but the field strength inside the plate is affected by Due to the influence of the external electric field, the dispersion of the electric field is very serious, and the degree of deflection of the charged particles at different positions from the electrode plate is different, resulting in the divergence of the angle of the charged particles, and the precise control of the flight direction of the charged particle beam cannot be realized.

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