Method and device for measuring thickness of membrane

A layer thickness and film layer technology, applied in the field of measuring film thickness, can solve the problems of increased measurement cost, large error and low accuracy

Inactive Publication Date: 2014-08-20
BOE TECH GRP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] To sum up, the use of optical methods to measure film thickness not only requires the preparation of samples, but also increases

Method used

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  • Method and device for measuring thickness of membrane
  • Method and device for measuring thickness of membrane
  • Method and device for measuring thickness of membrane

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0051] Embodiment 1 of the present invention provides a method for measuring film thickness, and the steps are as follows: figure 1 As shown, it specifically includes the following steps:

[0052] Step S1, determining the boundary of the film layer according to the difference of the reaction force on the probe.

[0053] Step S2, calculating the thickness of the film layer according to the position data measured by the displacement sensor on the probe or according to the time and movement speed of the probe penetrating the film layer.

[0054] The above method divides different film layers by feeling the change of reaction force when the probe passes through the film layer, and then obtains the thickness of the film layer according to the sensing of the displacement of the probe, or according to the movement speed of the probe penetrating the film layer and The required time is calculated to obtain the film thickness. Through this method, the thickness of the film layer on th...

Embodiment 2

[0076] In order to solve the above-mentioned technical problems, Embodiment 2 of the present invention also provides a device based on the above-mentioned method for measuring film thickness. The schematic diagram of the composition is as follows figure 2 As shown, it specifically includes a probe 10 and a control host 20, the probe is used to move along the film thickness direction, the probe 10 is also provided with a reaction force sensor 11 and a displacement sensor 12, wherein the reaction force sensor 11 is arranged on the probe 10 The top is used to sense the reaction force on the surface of the film layer to the probe, and a mutation signal is generated when the reaction force changes suddenly;

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Abstract

The invention discloses a method for measuring the thickness of a membrane. The method comprises the steps that firstly, the dividing line of the membrane is determined according to different reactive forces borne by a probe; secondly, the thickness of the membrane is worked out according to position data measured by a displacement sensor on the probe or the time and movement speed for the probe to penetrate through the membrane. According to the method, the dividing line of the membrane is determined according to the change of the reactive forces that the rigid probe penetrates through the membrane, the time when the probe starts to penetrate through the membrane and the time when the probe right penetrates through the membrane are determined according to the time when the reactive forces suddenly change, then the thickness of the membrane is worked out according to the probe movement speed and the penetrating time, the thickness of the membrane can be worked out according to the position data of the probe, samples do not need to be moved in the measuring process, only the probe needs to be moved, the measuring method is simple and easy to operate, the error of the obtained thickness data of the membrane is small, the obtained thickness is closer to the actual thickness, and accuracy is high. The invention further provides a device for achieving the method for measuring the thickness of the membrane.

Description

technical field [0001] The invention relates to the field of display technology, in particular to a method and device for measuring film thickness. Background technique [0002] At present, the commonly used methods for measuring the thickness of solid thin films mainly include probe method and optical method. The measurement principle of the probe method is to use a mechanically sensitive probe to slide along the surface of the sample, record the surface topography, and measure the film thickness; the optical method uses light interference or diffraction to measure the film thickness. [0003] In the process of measuring with the optical method, it is necessary to pre-fabricate the cross section of the sample, obtain the cross-sectional image, and then calculate the thickness of each film layer according to the image, but the surface of the film layer may be warped and the boundaries may be blurred during the process of sample preparation. Phenomenon, resulting in inaccura...

Claims

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Application Information

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IPC IPC(8): G01B21/08
Inventor 李兴亮梁魁封宾袁剑峰
Owner BOE TECH GRP CO LTD
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