An ultra-long stroke, high acceleration and high precision positioning one-dimensional platform
A positioning platform, high-precision technology, applied in the direction of machine/stand, supporting machine, mechanical equipment, etc., can solve the problem of high-precision positioning that cannot break through the ultra-long stroke and high acceleration
Inactive Publication Date: 2015-12-02
XI AN JIAOTONG UNIV
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Problems solved by technology
[0004] In view of the above defects or deficiencies, a one-dimensional platform for ultra-long travel, high acceleration and high-precision positioning is provided. This one-dimensional precision positioning platform solves the problem of high-precision positioning that cannot break through the ultra-long travel and high acceleration of the existing technology
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[0024] The present invention will be described in detail below in conjunction with the accompanying drawings.
[0025] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0026] Such as figure 1 As shown, the present invention provides a one-dimensional platform with ultra-long stroke, high acceleration and high precision positioning, comprising, a first buffer connection plate 7 and a second buffer connection plate 9 connected in series are installed on the base 1, and the first buffer connection plate The first lin...
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The invention provides a super-long-stroke high-acceleration high-precision-positioning one-dimensional platform which comprises a base, a linear motor rotor, a rough positioning platform, a piezoelectric actuator, a high-precision positioning platform, a first linear motor stator, a first buffer connecting plate, a second linear motor stator and a second buffer connecting plate. The rough positioning platform is connected with the high-precision positioning platform through the piezoelectric actuator. The rough positioning platform is connected with the super-long-stroke linear motor stators. The first super-long-stroke linear motor stator is connected with the second super-long-stroke linear motor stator in series. The first buffer connecting plate is connected with the second buffer connecting plate in series so as to obtain a super long stroke of the rough positioning platform. The first super-long-stroke linear motor stator is connected with a marble base through the first buffer connecting plate. The second super-long-stroke linear motor stator is connected with the marble base through the second buffer connecting plate. The super-long-stroke high-acceleration high-precision-positioning one-dimensional platform solves the problem that in the prior art, precise positioning with a longer stroke and a high acceleration can not be achieved.
Description
Technical field: [0001] The invention relates to a one-dimensional platform, in particular to an ultra-long stroke, high acceleration and high-precision positioning one-dimensional platform. Background technique [0002] In the field of precision engineering such as ultra-precision machining and microelectronics manufacturing, large-travel, high-acceleration and high-precision positioning platforms play a very important role as key equipment. At the same time of positioning, higher requirements are put forward for the positioning of ultra-long strokes. Designing an ultra-long stroke, high-acceleration and high-precision positioning platform is of great significance for increasing the platform speed and acceleration, shortening the machining time, and effectively improving productivity. [0003] At present, the high-acceleration and high-precision positioning in China is mainly completed by voice coil motors and piezoelectric drivers. Although these positionings have improve...
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Inventor 张璐凡张进华方记文吕杭原念龙生王勉
Owner XI AN JIAOTONG UNIV