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Driving method of ultra-precision linear stage using quadruped piezoelectric driver

A technology of electric drive and driving method, applied in piezoelectric effect/electrostrictive or magnetostrictive motors, generators/motors, electrical components, etc. Problems such as fast speed, large stroke and high precision, to achieve the effect of large stroke response ability

Active Publication Date: 2016-06-22
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to solve the problem that the positioning accuracy and resolution of existing piezoelectric ultrasonic drivers are difficult to improve, and cannot overcome the contradictions between strong load, fast speed, large stroke and high precision, and provides a four-legged piezoelectric driver. The driving method of the ultra-precision linear stage

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  • Driving method of ultra-precision linear stage using quadruped piezoelectric driver
  • Driving method of ultra-precision linear stage using quadruped piezoelectric driver
  • Driving method of ultra-precision linear stage using quadruped piezoelectric driver

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specific Embodiment approach 1

[0016] Specific implementation mode one: the following combination figure 1 , figure 2 , image 3 and Figure 4 Describe this embodiment, the driving method of the ultra-precision linear platform using a quadruped piezoelectric driver described in this embodiment, the ultra-precision linear platform using a quadruped piezoelectric driver includes a quadruped piezoelectric driver 1, a platform 2 and a base seat 3; the quadruped piezoelectric driver 1 includes a vertical beam 1-1, two horizontal beams 1-2 and six groups of piezoelectric ceramics 1-3, and the six groups of piezoelectric ceramics 1-3 are respectively two groups of vertical Piezoelectric ceramics 1-3-1 on straight beams, piezoelectric ceramics 1-3-2 on two sets of upper horizontal beams, and piezoelectric ceramics 1-3-3 on two sets of lower horizontal beams;

[0017] The piezoelectric ceramics 1-3-1 on the two groups of vertical beams are all arranged on the vertical beams 1-1, and are respectively arranged on ...

specific Embodiment approach 2

[0022] Specific implementation mode two: the following combination image 3 and Figure 4 This embodiment will be described, and this embodiment will further describe Embodiment 1. The vertical beam 1-1 and the two horizontal beams 1-2 in the ultra-precision linear platform using quadruped piezoelectric actuators are spatially orthogonally arranged.

specific Embodiment approach 3

[0023] Specific implementation mode three: the following combination image 3 and Figure 4 This embodiment will be described. This embodiment will further describe Embodiment 1. The lengths of the two horizontal beams 1-2 in the ultra-precision linear platform using quadruped piezoelectric actuators are the same.

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Abstract

The driving method of an ultra-precise linear platform using a four-legged piezoelectric driver belongs to the field of piezoelectric driving technology. The present invention solves the problem that the positioning accuracy and resolution of existing piezoelectric ultrasonic drivers are difficult to improve, and cannot overcome strong loads, fast speeds, and large strokes. There is a contradiction between high precision and precision. The ultra-precise linear platform using a quadruped piezoelectric driver of the present invention includes a quadruped piezoelectric driver, a platform and a base, and the quadruped piezoelectric driver includes a vertical beam, two horizontal beams and six groups of piezoelectric ceramics ;The ultra-precise linear stage adopting quadruped piezoelectric driver selects one of the following two excitation modes or a combination of the two excitation modes according to the target output speed to realize the drive of different displacement scales; the two excitation modes are respectively AC excitation continuous mode and DC excited stepper mode. The invention is suitable for driving various high-precision linear platforms, and the driving of multiple free platforms can also be realized through combination.

Description

technical field [0001] The invention relates to a driving method of an ultra-precision linear platform, belonging to the technical field of piezoelectric driving. Background technique [0002] Piezoelectric ultrasonic drive technology is a kind of inverse piezoelectric effect of piezoelectric ceramics, which excites vibration in the ultrasonic frequency range in the elastic body, forms a particle motion with a specific trajectory at a specific point or area on the surface of the elastic body, and then passes through the stator , The frictional coupling between the rotors converts the microscopic motion of the particle into the macroscopic motion of the rotor. The piezoelectric ultrasonic driver has the advantages of simple structure, flexible design, low speed and high torque, no electromagnetic interference, fast response and self-locking when power is off. [0003] However, when the piezoelectric ultrasonic actuator is actually working, it excites the continuous elliptica...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H02N2/06H02N2/14
Inventor 刘英想冯培连陈维山刘军考石胜君
Owner HARBIN INST OF TECH