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Preparation method of barium calcium zirconate titanate lead-free piezoelectric film

A barium calcium zirconate titanate, lead-free piezoelectric technology, applied to piezoelectric/electrostrictive/magnetostrictive devices, circuits, electrical components, etc., to achieve energy saving, simple operation, and low heat treatment temperature

Inactive Publication Date: 2016-08-17
SOUTHEAST UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] The above related patented technologies are used to prepare lead-free piezoelectric thin films by magnetron sputtering method, sol-gel method, etc., but there is no reference to the preparation of barium calcium zirconate titanate lead-free piezoelectric thin-film materials by sol-gel method.

Method used

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  • Preparation method of barium calcium zirconate titanate lead-free piezoelectric film
  • Preparation method of barium calcium zirconate titanate lead-free piezoelectric film
  • Preparation method of barium calcium zirconate titanate lead-free piezoelectric film

Examples

Experimental program
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Effect test

Embodiment 1

[0031] Step 1, with chemical general formula Ba(Ti 0.8 Zr 0.2 )O 3 -0.5(Ba 0.7 Ca 0.3 )TiO 3 As a basis, take by weighing 4.343g barium acetate and 0.529g calcium acetate monohydrate according to the ratio of barium calcium in the general chemical formula, dissolve them in 9g glacial acetic acid and 9g deionized water and stir evenly to prepare the barium calcium precursor body liquid; according to the chemical general formula Proportional Weigh 6.127g tetrabutyl titanate, 0.535g zirconyl nitrate, dissolve in 5.4g glacial acetic acid and 18g ethylene glycol methyl ether and stir evenly to prepare zirconium titanium precursor liquid;

[0032] Step 2. Mix and stir the barium-calcium precursor body fluid and the zirconium-titanium precursor body fluid described in step 1 evenly, add 1.338g of ethylene glycol, and heat in a water bath at a constant temperature to prepare BZT-0.5BCT sol;

[0033] Step 3. Spin-coat the BZT-0.5BCT sol described in step 2 onto Pt / Ti / SiO 2 On the...

Embodiment 2

[0036] The difference between this embodiment and Example 1 is that in Step 2, the additive added is 1.784 g polyethylene glycol 400, and the others are the same as Example 1.

Embodiment 3

[0038] The difference between this embodiment and Example 1 is that in step 2, no additives are added, and the others are the same as Example 1.

[0039] attached figure 1 The X-ray diffraction patterns of the samples obtained in Examples 1-3 are given, and it can be seen that all the samples are perovskite structures.

[0040] attached figure 2The microscopic image of the sample obtained in Example 2 is given, and it can be seen that the surface of the sample is dense and uniform without obvious holes and cracks.

[0041] attached image 3 The hysteresis loop diagram of the sample obtained in Example 1-2 is given. It can be seen that the sample with ethylene glycol as the additive has higher remanent polarization and larger coercive field strength than the sample with polyethylene glycol 400 as the additive.

[0042] attached Figure 4 The graph of the variation of the dielectric constant with the frequency of the samples obtained in Examples 1-3 is given. It can be seen...

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Abstract

The invention discloses a method for preparing a barium calcium zirconate titanate lead-free piezoelectric film. The general chemical formula of the barium calcium zirconate titanate is: Ba(Ti 0.8 Zr 0.2 )O 3 ‑0.5 (Ba 0.7 Ca 0.3 )TiO 3 . The barium calcium zirconate titanate wet film was prepared by spin coating by sol-gel method, and the barium calcium zirconate titanate lead-free piezoelectric film was obtained after heat treatment. The method is simple and reliable, has good process repeatability and strong operability. The barium calcium zirconate titanate lead-free piezoelectric film prepared by the invention is dense and uniform, has excellent dielectric properties (relative dielectric constant can reach 1500), and can be widely used in the fields of aviation, information, sensors and the like.

Description

technical field [0001] The invention relates to a preparation method of a lead-free piezoelectric film, in particular to a preparation method of a barium calcium zirconate titanate lead-free piezoelectric film. Background technique [0002] Lead-free piezoelectric thin films have been one of the research hotspots in the past ten years. Piezoelectric thin films have unique properties such as ferroelectricity, piezoelectricity, dielectricity, and nonlinear optics. Thin-film devices are small in size and light in weight, and can be combined with MEMS devices to convert electrical signals into mechanical responses as actuators, and can also convert mechanical responses into electrical signals as sensors, thus making piezoelectric films in microelectronics, integrated optics , information storage and micro-electro-mechanical systems have broad application prospects. [0003] In 2009, Professor Ren Xiaobing from Xi'an Jiaotong University prepared the first lead-free piezoelectric...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L41/187C04B35/49C04B35/624
Inventor 王增梅王欢欢蔡中兰赵宽
Owner SOUTHEAST UNIV