High-speed nano precision movement control method and system for piezoelectric ceramic driver

A piezoelectric ceramic and motion control technology, applied in general control systems, control/regulation systems, adaptive control, etc., can solve the problems of focusing on tracking accuracy, increasing the complexity of system modeling, and not considering tracking speed, etc., to eliminate The influence of motion accuracy and speed, and the effect of realizing high-speed nano-precision motion generation

Active Publication Date: 2014-10-29
SHANGHAI JIAO TONG UNIV
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Problems solved by technology

However, the defects and shortcomings of this technology are: 1) the dynamic hysteresis model is required, which increases the modeling complexity of the system; 2) the control must be combined with the neural network; 3) this method only focuses on the tracking accuracy and does not consider How to increase tracking speed with controls
However, the defects and shortcomings of this technology are: 1) The p

Method used

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  • High-speed nano precision movement control method and system for piezoelectric ceramic driver
  • High-speed nano precision movement control method and system for piezoelectric ceramic driver
  • High-speed nano precision movement control method and system for piezoelectric ceramic driver

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Embodiment 1

[0027] This embodiment includes the following steps:

[0028] Step 1. Describe the piezo actuator as figure 1 A dynamic system model in which the hysteresis nonlinear and linear dynamics are tandem is shown.

[0029] Step 2. Use the enhanced Prandtl‐Ishilinskii model H[ ] based on the Play operator to describe the hysteresis nonlinearity of the system. In practical applications, the enhanced Prandtl‐Ishilinskii model needs to be discretized, and the discretized enhanced Prandtl‐Ishilinskii model There are following equations that represent the mathematical expression as: w ( t ) = H [ u ] ( t ) = a 1 u 3 ( t ) + a 2 u ( ...

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Abstract

The invention discloses a high-speed nano precision movement control method and system for a piezoelectric ceramic driver and belongs to the technical field of movement control and precision manufacturing. The high-speed nano precision movement control method for the piezoelectric ceramic driver comprises firstly establishing a magnetic hysteresis nonlinear accurate model H [.] and an inverse character expression H <-1> [.] and designing a feedforward controller based on the H [.] to eliminate magnetic hysteresis nonlinearity of the piezoelectric ceramic driver; identifying a linear dynamic model G (s) of a piezoelectric ceramic driver with magnetic hysteresis compensation through a system identification method and designing an initiative damp controller which is used for increasing the gain margin of the system according to dynamic characteristics of the G (s); finally achieving high-speed nano precision movement control through a PID (Proportion Integration Differentiation) control algorithm. The high-speed nano precision movement control method for the piezoelectric ceramic driver can eliminate piezoelectric ceramic driver magnetic hysteresis nonlinearity and resonance vibration influences to the system movement speed and precision, is convenient and practical and can achieve real-time control.

Description

technical field [0001] The present invention relates to a method and system in the field of motion control and precision manufacturing technology, in particular to a high-speed nano-precision motion control method and system for a piezoelectric ceramic driver based on a dynamic system of hysteresis nonlinearity and linear dynamics in series . Background technique [0002] With the development of nanotechnology, precision manufacturing equipment has higher and higher requirements for nanometer motion precision. Motor drivers in the traditional sense can no longer meet the demanding requirements of this precision movement, and smart material drivers that can directly convert electrical or magnetic energy into mechanical energy are needed. Due to the advantages of high displacement resolution, large driving force, high stiffness, high bandwidth, and fast response speed, piezoelectric ceramic actuators are increasingly used. However, in actual control, the piezoelectric cerami...

Claims

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Application Information

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IPC IPC(8): G05B13/04
Inventor 谷国迎朱利民
Owner SHANGHAI JIAO TONG UNIV
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