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Slit coater

A coating machine and photoresist technology, which is applied to devices and coatings for coating liquid on the surface, can solve the problems of nozzle damage, production waste, and inability to detect in time, so as to avoid damage to the nozzle and improve the yield. Effect

Inactive Publication Date: 2014-11-26
EVERDISPLAY OPTRONICS (SHANGHAI) CO LTD
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  • Abstract
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  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] (2) if figure 2 As shown, an interference strip is installed in front of the photoresist nozzle 0. When the foreign object detection sensor cannot detect the particle 1 normally, the particle 1 is stuck through the interference strip 2 to avoid / or reduce the probability of damage to the photoresist nozzle 0. The disadvantage is that if particles 1 fall off, the foreign object detection sensor cannot detect them in time and the interference strip 2 cannot completely catch the particles 1, which will cause damage to the nozzle 0, and then cause horizontal uneven trace lines (Suji Mura) on the display, etc. There will be a large number of abnormal products and the glass substrate 3 needs to be remade or directly scrapped, which constitutes a serious waste of production

Method used

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Embodiment Construction

[0041] The present invention will be further described below in combination with principle diagrams and specific operation examples. It should be noted that, in the case of no conflict, the examples and features in the examples of the present invention can be combined with each other.

[0042] The photoresist coating machine of the present invention includes a photoresist nozzle 0, an interference strip 2 is arranged in front of the photoresist nozzle 0, and the photoresist nozzle 0 performs photoresist coating on a glass substrate 3, and the "front" is Refers to the direction of motion along the photoresist coating on the glass substrate 3 . As the photoresist nozzle 0 moves forward slowly, a layer of uniform photoresist 00 is gradually formed on the surface of the glass substrate 3 . The interference bars 2 are perpendicular to the glass substrate 3 and parallel to the photoresist nozzle 0 . A jet flow back-suction device 4 is arranged in front of the interference bar 2. Th...

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Abstract

The invention discloses a slit coater, which comprises: a photoresist nozzle and an interference bar arranged in front of the photoresist nozzle. A jet back-suction device is disposed in front of the interference bar, and comprises an air driving device and a jet back-suction main body. The upper end of the jet back-suction main body is in pivot connection with the interference bar. The jet back-suction main body has an opening lower end, and includes a jet cavity and a suction cavity. The bottoms of the jet cavity and the suction cavity are both communicated with air. Driven by the air driving device, the gas jetted from the jet cavity is sucked by the suction cavity. The lower end of the jet back-suction main body does not contact a glass. Through the strong suction flow of the jet back-suction device, particles dropping on the glass can be sucked through another flow suction port at the same time so as to form a third checkpoint other than a sensor and an interference bar and increasing the rate of finished products.

Description

technical field [0001] The invention relates to the technical field of photoresist coating, in particular to a photoresist coating machine applied in the photoresist coating process of Array / CF Photo Process. Background technique [0002] In the photoresist coating process of the Array / CF Photo Process (Array / CF Photo Process), due to the latest mainstream equipment, a photoresist coating machine (Slit coater) is used to coat the photoresist vertically. Since the gap between the photoresist coating nozzle (nozzle) and the glass substrate (glass) is about 200 μm, during the coating process, if there are particles falling on the glass substrate during the transmission process, the photoresist After the coating nozzle or interference bar (bar) comes into contact with particles, it will cause nozzle damage, glass scratches, fragments, or cause taste problems (such as mura phenomenon) of various products and other abnormalities. [0003] At present, there are two main methods fo...

Claims

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Application Information

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IPC IPC(8): B05C5/02B05C11/10
Inventor 吴韦良
Owner EVERDISPLAY OPTRONICS (SHANGHAI) CO LTD