Double-sided electrophoresis frame

An electrophoretic, double-sided technology, applied in the direction of electrophoretic plating, electrolytic coating, coating, etc., can solve the problems of inconsistent glass layer thickness, poor parameters, poor reliability, etc., to improve product yield and reliability, and avoid inconsistent thickness , Good consistency of electrophoresis

Active Publication Date: 2014-12-03
TIANJIN ZHONGHUAN SEMICON CO LTD
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AI Technical Summary

Problems solved by technology

There are problems in the existing technology: 1. The thickness of the glass layer on both sides is inconsistent due to the two electrophoresis. 2. After the second electrophoresis, it is found that the glass in some areas around the first electrophoresis surface falls off, resulting in poor parameters, low yield and reliability. gender issues

Method used

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Embodiment Construction

[0012] The present invention will be further described below in conjunction with accompanying drawing and embodiment:

[0013] refer to figure 1 , a double-sided electrophoresis frame includes a beam 1, a negative electrode plate 2, a positive electrode ring 3, a supporting plate 4, a positioning plate 5, a slot 6 and a side plate 7, wherein the two ends of the beam 1 are horizontally fixed on the upper part of the two side plates 7 On the inner side, two positioning plates 5 are respectively fixed on the outer sides of the upper part of the two side plates 7, the slot 6 for connecting with the power supply of the electrophoresis equipment is fixed on the upper end of one of the side plates 7, and the two ends of the supporting plate 4 are horizontally fixed on both sides On the inner side of the lower part of the plate 7, several negative electrode plates 2 and positive electrode rings 3 are alternately fixed on the supporting plate 4 in sequence.

[0014] refer to figure ...

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Abstract

The invention relates to double-sided production equipment for GPP (general purpose polystyrene) protective transistor chips and particularly relates to a modified double-sided electrophoresis frame for electrophoresis. The double-sided electrophoresis frame comprises a beam, negative electrode plates, positive electrode rings, a supporting plate, positioning plates, an insertion slot and side plates, wherein the two ends of the beam are horizontally fixed at the upper inner sides of the two side plates; the insertion slot which is connected with a power supply of electrophoresis equipment is fixed at the upper end of one side plate; the two ends of the supporting plate are horizontally fixed at the lower inner sides of the two side plates; and a plurality of negative electrode plates and positive electrode rings are alternatively fixedly arranged on the supporting plate in sequence. By using the double-sided electrophoresis frame, the two sides of a silicon wafer are good in electrophoresis consistency, so that the problem that the glass layers on the two sides of the silicon wafer are inconsistent in thickness due to twice single-sided electrophoresis is avoided, and the two sides are unlikely to damage during electrophoresis, so that the product yield and the reliability are improved.

Description

technical field [0001] The invention relates to production equipment for double-sided GPP protection transistor chips, in particular to a modified double-sided electrophoresis rack for electrophoresis. Background technique [0002] At present, the production of double-sided GPP protection transistors (diodes, discharge tubes, etc.) in the semiconductor industry requires glass passivation protection on both sides. The double-sided electrophoresis process usually uses electrophoresis on one side first, and then electrophoresis on the other side. There are problems in the existing technology: 1. The thickness of the glass layer on both sides is inconsistent due to the two electrophoresis. 2. After the second electrophoresis, it is found that the glass in some areas around the first electrophoresis surface falls off, resulting in poor parameters, low yield and reliability. gender issues. Contents of the invention [0003] The object of the present invention is to provide a do...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C25D13/16
Inventor 薄勇杨玉聪刘玉涛安毅力王晓捧
Owner TIANJIN ZHONGHUAN SEMICON CO LTD
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