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A double-sided electrophoresis rack

An electrophoretic and double-sided technology, applied in the direction of electrophoretic plating, electrolytic coating, coating, etc., can solve the problems of inconsistent glass layer thickness, poor parameters, and poor reliability, so as to improve product yield and reliability, and avoid thickness inconsistency , Good consistency of electrophoresis

Active Publication Date: 2016-10-05
TIANJIN ZHONGHUAN SEMICON CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

There are problems in the existing technology: 1. The thickness of the glass layer on both sides is inconsistent due to the two electrophoresis. 2. After the second electrophoresis, it is found that the glass in some areas around the first electrophoresis surface falls off, resulting in poor parameters, low yield and reliability. gender issues

Method used

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  • A double-sided electrophoresis rack
  • A double-sided electrophoresis rack
  • A double-sided electrophoresis rack

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Embodiment Construction

[0012] The present invention will be further described below in conjunction with the drawings and embodiments:

[0013] Reference figure 1 A double-sided electrophoresis rack includes a beam 1, a negative plate 2, a positive ring 3, a supporting plate 4, a positioning plate 5, a slot 6 and a side plate 7, wherein the two ends of the beam 1 are horizontally fixed on the upper part of the two side plates 7 On the inside, two positioning plates 5 are respectively fixed on the upper outer sides of the two side plates 7, the slot 6 for connecting with the electrophoresis equipment power supply is fixed at the upper end of one of the side plates 7, and the two ends of the pallet 4 are fixed horizontally on both sides Inside the lower part of the plate 7, several negative plates 2 and positive rings 3 are alternately fixed on the support plate 4 in turn.

[0014] Reference figure 2 with image 3 , The negative plate 2 fixed on the supporting plate 4 includes a negative plate body 2A and ...

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Abstract

The invention relates to double-sided GPP protection transistor chip production equipment, in particular to a modified double-sided electrophoresis rack for electrophoresis. The double-sided electrophoresis frame includes a beam, a negative plate, a positive ring, a support plate, a positioning plate, a slot and a side plate. On the outer side of the upper part, the slot for connecting with the power supply of the electrophoresis equipment is fixed on the upper end of one of the side plates, the two ends of the supporting plate are horizontally fixed on the lower inner side of the two side plates, and several negative plates and positive rings are alternately fixed on the supporting plate. board. Using a double-sided electrophoresis frame, the consistency of electrophoresis on both sides of the silicon wafer at the same time is good, avoiding the problem of inconsistent thickness of the glass layers on both sides of the silicon wafer caused by two single-sided electrophoresis, and the simultaneous electrophoresis on both sides is not easy to be damaged, thereby improving product yield and reliability.

Description

Technical field [0001] The invention relates to a double-sided GPP protective transistor chip production equipment, in particular to a modified double-sided electrophoresis rack for electrophoresis. Background technique [0002] At present, the production of double-sided GPP protection transistors (diodes, discharge tubes, etc.) in the semiconductor industry requires glass passivation protection on both sides of the chip. The double-sided electrophoresis process usually adopts a process of electrophoresis on one side and then electrophoresis on the other side. The existing technology has problems: 1. The thickness of the glass layers on both sides is inconsistent due to two electrophoresis. 2. After the second electrophoresis, it is found that part of the area around the first electrophoresis surface has fallen off, resulting in poor parameters, low yield and reliability. Poor sex and other issues. Summary of the invention [0003] The purpose of the present invention is to provi...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C25D13/16
Inventor 薄勇杨玉聪刘玉涛安毅力王晓捧
Owner TIANJIN ZHONGHUAN SEMICON CO LTD
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