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A substrate peelable epitaxial structure and its application

An epitaxial structure and substrate technology, applied in photovoltaic power generation, electrical components, electrical solid devices, etc., can solve problems such as easy damage of epitaxial layers

Active Publication Date: 2017-04-26
XIAMEN CHANGELIGHT CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] One of the objectives of the present invention is to provide an epitaxial structure in which the substrate can be stripped, so as to increase the stripping rate between the epitaxial layer and the substrate, and effectively solve the problem that the epitaxial layer is easily damaged during stripping

Method used

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  • A substrate peelable epitaxial structure and its application
  • A substrate peelable epitaxial structure and its application

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Embodiment Construction

[0042] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0043] Such as figure 1 As shown, the present invention discloses a solar cell epitaxial structure with a substrate that can be peeled off. On the surface of the substrate 1 from bottom to top, epitaxial buffer layer 2, sacrificial layer 3, ohmic contact layer 4, top cell window layer 5, Top cell emission region 6, top cell base region 7, top cell BSF layer 8, middle top cell tunnel junction 9, middle cell window layer 10, middle cell emission region 11, middle cell base region 12, middle cell BSF layer 13, Middle bottom cell tunnel junction 14 , composition graded layer 15 , bottom cell window layer 16 , bottom cell emitter region 17 , bottom cell base region 18 and bottom cell BSF layer 19 .

[0044] The substrate 1 is a 4-inch GaAs substrate with a thickness of 400 μm. The material of the buffer layer 2 is GaAs III-V compound with a thic...

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Abstract

The invention discloses an epitaxial structure with a strippable substrate. A sacrificial layer is arranged between a battery epitaxial structure or an epitaxial light emitting structure and the substrate and is composed of AlInP / AlAs multilayered structures growing alternately. The invention further discloses a solar battery epitaxial structure with a strippable substrate and a light emitting diode epitaxial structure with a strippable substrate. The stripping speed of an epitaxial layer and a substrate can be increased, and meanwhile the problem that epitaxial layers are prone to damage when being stripped is solved effectively.

Description

technical field [0001] The invention relates to the field of optoelectronic technology, and in particular provides a substrate-detachable epitaxial structure and its application. Background technique [0002] The development of optoelectronic technology is changing with each passing day. Among them, the absorption range of triple-junction gallium arsenide solar cells covers most of the wavelength bands of sunlight, and has the highest conversion efficiency among all solar cells. Light-emitting diodes (LEDs) are rapidly developing as the main light source due to their low power consumption, small size, and high reliability. [0003] Substrate lift-off technology provides necessary technical support for the development of solar cells and light-emitting diodes to thin film. The repeated utilization of the substrate also reduces the production cost of thin-film solar cells and thin-film LEDs, and reduces environmental pollution and waste of resources during the production proce...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L23/00H01L33/22H01L31/0352H01L31/0725
CPCY02E10/50
Inventor 林志伟张永陈凯轩姜伟蔡建九吴洪清李俊承方天足卓祥景张银桥黄尊祥王向武
Owner XIAMEN CHANGELIGHT CO LTD