Three-dimensional integrated micromachined acceleration sensor and manufacturing method for suppressing lateral interference

Abstract

The invention provides a three-dimensional integration micro-machine acceleration sensor restraining transverse interference. Three independent acceleration sensing units are integrated, signals in three directions cannot be coupled or interfere with one another, and acceleration signals in each direction can be accurately output and extracted. The acceleration sensing unit in the Z-axis direction is composed of fixing and supporting plates and sensitivity resistors, wherein the fixing and supporting plates are arranged in parallel, the single end of each fixing and supporting plate is fixed and supported, the sensitivity resistors are located at the fixing and supporting ends of the fixing and supporting plates and are perpendicular to one another, and transverse interference caused by acceleration in the X-axis direction and the Y-axis direction is effectively restrained. Appropriate designing and modifying are carried out on key sizes of a sensitive structure, and the three-dimensional integration micro-machine acceleration sensor capable of restraining the transverse interference and having different measuring ranges from 10,000 g to 200,000 g can be acquired; the acceleration sensing units in the three directions have similarities in structure, the adopted technology is common in micro-machine manufacturing, the technologies can be compatible, integration is easy, the manufacturing cost is low, and large-scale production can be achieved easily.

Description

technical field [0001] The invention belongs to the field of silicon micromechanical sensors, and relates to a three-dimensional integrated micromechanical acceleration sensor for suppressing lateral interference and a manufacturing method. Background technique [0002] With the development of micro-mechanical system (MEMS) sensor technology, various MEMS sensors have attracted people's attention, among which micro-mechanical acceleration sensors have been widely used in different fields, such as in automatic control, vibration testing and aerospace fields. application. The piezoresistive acceleration sensor has good dynamic response characteristics and output linearity, and has broad application prospects. However, in the measurement of various sports, the one-dimensional acceleration sensor can no longer meet the application requirements well, so the three-dimensional acceleration sensor has become an important direction for the development of MEMS acceleration sensors. ...

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Problems solved by technology

[0004] In view of the shortcomings of the prior art described above, the purpose of the present invention is to provide a three-dimensional integrated micro-machined acceleration sensor and its manufacturing method that suppresses lateral interference, which is used to solve the three-dimensional acceleration sensor in the prior art. There is a large coupling interference, and the output of the signal is prone to interference problems; the device size is large, and the requirements for axial alignment accuracy are relatively high, which is difficult to achieve and the acceleration sensor has a large lateral interference problem

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