A developing device and developing method
A technology of developing device and developing method, which is applied in the processing of photosensitive materials, etc., can solve the problems of uneven developing solution and affecting developing uniformity, and achieve the effect of improving uniformity and consistent developing degree
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Embodiment 1
[0046] See figure 2 The embodiment of the present invention provides a developing device, including: a heating device slidably installed at the bottom of the developing chamber and capable of heating the substrate 2 entering the developing chamber, and the heating device applies the heating temperature of the peripheral area of the substrate 2 Lower than the temperature of the middle area of the substrate 2; a driving device connected to the heating device; a sensor that detects whether the substrate 2 entering the developing chamber is paired with the heating device 4; a control device connected to the driving device and the sensor signal, when the sensor detects When the substrate 2 entering the developing chamber is facing the heating device, the control device controls the driving device to drive the heating device to move horizontally with the substrate 2 synchronously.
[0047] When the above-mentioned developing device is used, the substrate 2 enters the developing cha...
Embodiment 2
[0057] See Figure 7 , The embodiment of the present invention also provides a developing method, including:
[0058] Step 101: The substrate 2 enters the developing chamber, and the developer is evenly coated on the upper surface of the substrate 2;
[0059] Step 102: The sensor detects whether the substrate 2 entering the developing chamber is directly facing the heating device;
[0060] Step 103: When the sensor detects that the substrate 2 entering the developing chamber is facing the heating device, the control device controls the heating device to heat the substrate 2, and the heating device applies a lower temperature in the peripheral area of the substrate 2 than the heating device applies to the substrate For the temperature in the middle area of 2, the control device controls the driving device to drive the heating device to move horizontally in synchronization with the substrate 2.
[0061] In more detail, the substrate 2 enters the developing chamber, and the develope...
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