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A developing device and developing method

A technology of developing device and developing method, which is applied in the processing of photosensitive materials, etc., can solve the problems of uneven developing solution and affecting developing uniformity, and achieve the effect of improving uniformity and consistent developing degree

Inactive Publication Date: 2018-02-27
BOE TECH GRP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] However, the above-mentioned development process has the following defects: when the substrate 2 is kept in a horizontal state and moved forward by the rollers, part of the developer coated on the substrate 2 will flow to the peripheral area of ​​the substrate 2, so that the peripheral area of ​​the substrate 2 The concentration of the developer in the substrate 2 is higher than the concentration of the developer in the middle area of ​​the substrate 2, resulting in uneven developer on the substrate 2, which in turn affects the uniformity of development

Method used

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  • A developing device and developing method

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Embodiment 1

[0046] See figure 2 The embodiment of the present invention provides a developing device, including: a heating device slidably installed at the bottom of the developing chamber and capable of heating the substrate 2 entering the developing chamber, and the heating device applies the heating temperature of the peripheral area of ​​the substrate 2 Lower than the temperature of the middle area of ​​the substrate 2; a driving device connected to the heating device; a sensor that detects whether the substrate 2 entering the developing chamber is paired with the heating device 4; a control device connected to the driving device and the sensor signal, when the sensor detects When the substrate 2 entering the developing chamber is facing the heating device, the control device controls the driving device to drive the heating device to move horizontally with the substrate 2 synchronously.

[0047] When the above-mentioned developing device is used, the substrate 2 enters the developing cha...

Embodiment 2

[0057] See Figure 7 , The embodiment of the present invention also provides a developing method, including:

[0058] Step 101: The substrate 2 enters the developing chamber, and the developer is evenly coated on the upper surface of the substrate 2;

[0059] Step 102: The sensor detects whether the substrate 2 entering the developing chamber is directly facing the heating device;

[0060] Step 103: When the sensor detects that the substrate 2 entering the developing chamber is facing the heating device, the control device controls the heating device to heat the substrate 2, and the heating device applies a lower temperature in the peripheral area of ​​the substrate 2 than the heating device applies to the substrate For the temperature in the middle area of ​​2, the control device controls the driving device to drive the heating device to move horizontally in synchronization with the substrate 2.

[0061] In more detail, the substrate 2 enters the developing chamber, and the develope...

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Abstract

The invention discloses a developing device and a developing method, and relates to the technical field of display panel production. The developing device includes: a heating device that is slidably installed at the bottom of the developing chamber and can heat the substrate entering the developing chamber, and the temperature applied by the heating device to the peripheral area of ​​the substrate is lower than that applied to the substrate. The temperature of the central region of the substrate; the driving device connected with the heating device; the sensor for detecting whether the substrate entering the developing chamber is facing the heating device; and the driving device and the sensor signal respectively A connected control device, when the sensor detects that the substrate entering the developing chamber is facing the heating device, the control device controls the driving device to drive the heating device to a level synchronous with the substrate move. When the developing device provided by the invention is used to develop the substrate, the uniformity of development is improved.

Description

Technical field [0001] The present invention relates to the technical field of display panel manufacturing, in particular to a developing device and a developing method. Background technique [0002] At present, in the production process of display panels such as liquid crystal panels, there are mainly two methods of development: rotary development and spray development. Because the rotary development method requires multiple developments, fog and static electricity will be generated, resulting in low productivity. Therefore, spray development is usually used in the production process of liquid crystal panels. [0003] See figure 1 , The process of the spray developing method is usually: the substrate 2 enters the developing device horizontally through the inlet 11, in the developing chamber 12 of the developing device, the developer is evenly coated on the substrate 2 through the drip nozzle; the substrate 2 is kept in a horizontal state, and The roller is transported forward to...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G03F7/30G03F7/38
Inventor 刘明悬张小祥张治超刘正陈曦郭总杰
Owner BOE TECH GRP CO LTD