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Gas flow test method, gas flow test device and clean room control system

By detecting the one-dimensional speed of the airflow in multiple directions during the production process of the display device and calculating the actual direction and speed, the problem of the complexity of the existing technology and the influence of temperature and humidity is solved, a simplified airflow testing method and equipment is realized, and the cleanliness is improved. accuracy and applicability of detection.

Inactive Publication Date: 2015-03-04
HEFEI XINSHENG OPTOELECTRONICS TECH CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] But the disadvantage of this method is that the test device itself is more complicated, and the introduction of sample gas will affect the temperature and humidity in the test space

Method used

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Embodiment Construction

[0041] Specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings. It should be understood that the specific embodiments described here are only used to illustrate and explain the present invention, and are not intended to limit the present invention.

[0042] As an aspect of the present invention, a kind of air flow testing method is provided, such as figure 1 As shown, the airflow test method includes:

[0043] S10, setting a plurality of test points in the test space;

[0044] S20. Detect the one-dimensional velocity of the airflow at each of the test points along multiple test directions, where the multiple test directions include at least three directions;

[0045] S30. Calculate the actual direction and actual velocity of the airflow at the test point according to the one-dimensional velocities of the airflow at the test point along multiple test directions.

[0046] In the present invention, after the...

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Abstract

The invention provides a gas flow test method which comprises the following steps of: setting a plurality of test points in a test space; detecting the one-dimensional speed, along multiple test directions, of the gas flow at each test point, wherein the multiple test directions at least include three directions; calculating the practical direction and the practical speed of the gas flow at the test point according to the one-dimensional speed, along the multiple test directions, of the gas flow at each test point. Correspondingly, the invention further provides a gas flow test device and a clean room control system. A simple method is adopted to test the distribution of the gas flow in the test space.

Description

technical field [0001] The invention relates to the manufacturing field of display devices, in particular to an airflow testing method, an airflow testing device and a clean room control system including the airflow testing device. Background technique [0002] In the production process of display devices, impurity particles have a great impact on product quality, so whether the cleanliness meets the standard becomes very important to product quality. In order to ensure the cleanliness of the clean room and the interior of the equipment, it is necessary to detect the airflow distribution. [0003] In the prior art, a visual testing device and method for airflow organization is to pass a sample gas with a temperature difference from the ambient gas into the test space to form a sample airflow in the test space, and then use a thermal imaging device to continuously detect the spatial position of the sample gas. [0004] However, the disadvantage of this method is that the tes...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P5/00G01P13/02
CPCG01P13/045G01P5/001
Owner HEFEI XINSHENG OPTOELECTRONICS TECH CO LTD