Spatial split-wave test method for cross-axis response of shock acceleration sensor
A technology of an acceleration sensor and a testing method, which is applied in the testing/calibration of speed/acceleration/shock measurement equipment, speed/acceleration/shock measurement, and instruments, and can solve problems such as the inability to accurately determine the output value of the cross-axis of the acceleration sensor, and achieve The effect of suppressing high-frequency waves, eliminating confusion, and eliminating interference factors
Active Publication Date: 2017-12-05
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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[0004] In view of the above-mentioned shortcomings of the prior art, the purpose of the present invention is to provide a space split-wave test method for the cross-axis response of the shock acceleration sensor, which is used to solve the problem of wave superposition of various components in the prior art due to the test process. into the main output wave, so that the inherent cross-axis output value of the acceleration sensor itself cannot be accurately determined
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[0034] Embodiments of the present invention are described below through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific implementation modes, and various modifications or changes can be made to the details in this specification based on different viewpoints and applications without departing from the spirit of the present invention.
[0035] see figure see Figure 1 to Figure 6 . It should be noted that the diagrams provided in this embodiment are only schematically illustrating the basic concept of the present invention, although only the components related to the present invention are shown in the diagrams rather than the number, shape and Dimensional drawing, the type, quantity and proportion of each component can be changed arbitrarily during actual implementa...
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The present invention proposes a space split wave test method for the cross-axis response of the shock acceleration sensor, which uses a metal rod with a certain length-to-diameter ratio, which is beneficial to realize the automatic separation of the torsional wave and the longitudinal wave, so that the torsional wave does not affect the main wave. Extrinsic interference factors, to obtain the inherent cross-axis response of the device; according to the different wave velocities of the longitudinal wave and the torsional wave, the two waves are separated in space, and the time for the spatial separation of the torsional wave, longitudinal wave and main wave is given Criterion, to exclude the extrinsic influence of torsional waves on the acceleration sensor; in the process of testing, different mechanical filter materials, such as different types of double-sided adhesive tape, can be used to filter and shape the generated waves. It is beneficial to suppress high-frequency waves, eliminate interference, and is beneficial to the identification and separation of torsional waves, and can obtain the cross-axis response of the acceleration sensor at different frequencies.
Description
technical field [0001] The invention belongs to the field of mechanical testing and analysis of micro-sensors, and relates to a space split-wave testing method for the cross-axis response of an impact acceleration sensor. Background technique [0002] In the test of the acceleration sensor, it is usually necessary to obtain the cross-axis response of the acceleration sensor, or called the cross-axis sensitivity, which is an important index for evaluating the performance of the acceleration sensor. The so-called cross-axis response refers to the ratio of the output of the acceleration sensor in the non-sensitive direction to the output in the sensitive direction under the same acceleration load. A uniaxial acceleration sensor is a device that is only sensitive to one direction, and the direction perpendicular to the direction of the sensitive axis is defined as the cross-axis direction. In the process of designing and manufacturing the acceleration sensor, the cross-axis eff...
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IPC IPC(8): G01P21/00
Inventor 鲍海飞宋朝辉李昕欣张鲲
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI