Unlock instant, AI-driven research and patent intelligence for your innovation.

Fluorine-containing elastomer and vulcanizable composition thereof

A technology for elastomers and compositions, applied in the field of fluoroelastomers and their vulcanizable compositions, to achieve the effects of low adhesion and excellent plasma resistance

Active Publication Date: 2015-03-18
UNIMATEC CO LTD +1
View PDF10 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0017] The fluoroelastomer described in the above-mentioned Patent Document 2 has a cyano group that undergoes a crosslinking reaction with a bisamidine oxime compound as a vulcanizing agent, and the fluoroelastomer composition mixed with the vulcanizing agent can provide processing properties such as roll kneading properties. Although the vulcanized molded product has no problem in terms of performance and is satisfactory in terms of heat resistance and solvent resistance, although the compression set value under the conditions of 275°C or 300°C for 70 hours was measured, the compression set value at 300°C In terms of deformation value, it cannot be said that it has sufficient heat resistance to withstand use at a high temperature of 300°C used in semiconductor manufacturing equipment

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Fluorine-containing elastomer and vulcanizable composition thereof
  • Fluorine-containing elastomer and vulcanizable composition thereof
  • Fluorine-containing elastomer and vulcanizable composition thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0068] 60 kg of distilled water, 2000 g of ammonium perfluorooctanoate, and 800 g of potassium dihydrogen phosphate were charged into a stainless steel autoclave with an inner volume of 100 L, and the inside of the autoclave was replaced with nitrogen, followed by depressurization. To this was added the following substances in order:

[0069]

[0070] After raising the temperature to 60° C., 5 L of an aqueous solution in which 70 g of ammonium persulfate and 15 g of sodium sulfite were dissolved was added thereto to initiate a polymerization reaction.

[0071]In the polymerization reaction, VdF was added at a rate of 0.06kg / hour, TFE was added at a rate of 1.2kg / hour, FMVE was added at a rate of 1.2kg / hour, and CPeVE was added at a rate of 85g / hour. During this period, the pressure of the autoclave was maintained at 0.75-0.85 MPa. After 7 hours from the start of the polymerization reaction, the addition was stopped, the autoclave was cooled, and the remaining gas was purge...

Embodiment 2

[0078] 60 kg of distilled water, 2000 g of ammonium perfluorooctanoate, and 800 g of potassium dihydrogen phosphate were charged into a stainless steel autoclave with an inner volume of 100 L, and the inside of the autoclave was replaced with nitrogen, followed by depressurization. To this was added the following substances in order:

[0079]

[0080] After raising the temperature to 60° C., 5 L of an aqueous solution in which 70 g of ammonium persulfate and 15 g of sodium sulfite were dissolved was added thereto to initiate a polymerization reaction.

[0081] In the polymerization reaction, VdF was added at a rate of 0.06kg / hour, TFE was added at a rate of 1.2kg / hour, FMVE was added at a rate of 1.2kg / hour, and CEPVE was added at a rate of 120g / hour. During this period, the pressure of the autoclave was maintained at 0.75-0.85 MPa. After 7 hours from the start of the polymerization reaction, the addition was stopped, the autoclave was cooled, and the remaining gas was pur...

reference example 1

[0085] 60 kg of distilled water, 2000 g of ammonium perfluorooctanoate, and 800 g of potassium dihydrogen phosphate were charged into a stainless steel autoclave with an inner volume of 100 L, and the inside of the autoclave was replaced with nitrogen, followed by depressurization. To this was added the following substances in order:

[0086]

[0087] After raising the temperature to 60° C., 5 L of an aqueous solution in which 70 g of ammonium persulfate and 15 g of sodium sulfite were dissolved was added thereto to initiate a polymerization reaction.

[0088] During the polymerization reaction, TFE was added at a rate of 1.3kg / hour, FMVE was added at a rate of 1.2kg / hour, and CPeVE was added at a rate of 85g / hour, during which the pressure of the autoclave was maintained at 0.75-0.85MPa . After 7 hours from the start of the polymerization reaction, the addition was stopped, the autoclave was cooled, and the remaining gas was purged to obtain 81 kg of an aqueous latex havi...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

A quaternary copolymer, fluorine-containing elastomer having a copolymerization composition comprising: (A) 2.0 to 8.0 mol % of vinylidene fluoride, (B) 60.0 to 70.0 mol % of tetrafluoroethylene, (C) 35.0 to 25.0 mol % of perfluoro(lower alkyl vinyl ether) or perfluoro(lower alkoxy-lower alkyl vinyl ether), and (D) 0.2 to 3.0 mol % of a perfluoro unsaturated nitrile compound, and having a Mooney viscosity ML1+10(121° C.) of 65 to 110, as well as a vulcanizable fluorine-containing elastomer composition comprising said fluorine-containing elastomer and a bisamidoxime compound in an amount of 0.2 to 5 parts by weight based on 100 parts by weight of the fluorine-containing elastomer. A sealing material obtained by vulcanization-molding of the fluorine-containing elastomer has not only excellent compression set characteristics and plasma resistance, but also low adhesion to metal at a higher temperature, specifically 150° C.

Description

technical field [0001] This invention relates to fluoroelastomers and vulcanizable compositions thereof. More specifically, it relates to a fluoroelastomer used as a vulcanization molding material of a sealing material and a vulcanizable composition thereof for use in plasma irradiation applications and the like. Background technique [0002] Seals for semiconductor manufacturing equipment refer to components used as seals in processing chambers for etching or thin film formation on the surface of silicon wafers as semiconductor substrates, and are required to have heat resistance, low air permeability, Low dust generation (little generation of dust from sealing), etc. During silicon wafer etching process, etc., due to oxygen or CF 4 Plasma irradiation is performed in an environment, so the gas such as oxygen or halogen is in an excited state. As a result, the sealing of semiconductor manufacturing equipment is easy to deteriorate, and the surface becomes brittle, and the ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): C08F214/26C08F214/22C08F216/14C08F220/42C08K5/33C08L27/18
CPCC09K3/1009C08F216/1408C08J3/24C08F214/26C08K5/33C08J2327/18C08F216/1458C08F214/262C09K2003/1053C08J3/247C08L27/18C08F214/22
Inventor 池田昭彦前田满工藤正嗣行木英人森邦彦
Owner UNIMATEC CO LTD