A scanning metal surface imaging and component analysis device
A metal surface and component analysis technology, which is applied in the direction of measuring devices, analyzing materials, and using wave/particle radiation for material analysis, etc., to achieve the effect of improving analysis accuracy and reasonable structural design
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[0026] The technical solutions of the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0027] refer to figure 1 , in the scanning metal surface imaging and component analysis device of the present invention, X-ray tube 1 generates incident X-rays, and its energy is determined by high-voltage control system 6; X-ray tube 1, X fluorescence probe 2, collimator 3, position sensitive The photomultiplier tube 4 , the detector package 5 , and the laser range finder 13 are all arranged in the shielding body 16 and above the sample stage 15 . The X-ray tube 1 and the X-fluorescent probe 2 are reflectively arranged, the laser rangefinder 13 is arranged directly above the sample 17, and the X-ray tube 1 and the X-fluorescent probe 2 are symmetrically arranged on both sides of the laser rangefinder 13 respectively. The angle α between the surface normal of tube 1 and sample 17 is 67.5°, the angle β betwe...
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