Quartz crystal oscillator sensor with characteristic of selective adsorption modification on metal films
A technology of selective adsorption and quartz crystal oscillator, applied in the direction of material absorption and weighing, can solve the problems of thermal control performance degradation, easy deposition on the surface of the device, and optical performance degradation.
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Embodiment 1
[0018] Embodiment 1: The quartz crystal oscillator sensor modified by selective adsorption of the metal film of the present invention is obtained according to the following method:
[0019] (1) The quartz wafer is placed in an evaporation machine, and the metal film layer electrodes (2) and (3) are plated by a mask method. According to requirements, gold is selected as the material of the electrode film layer. Other metal materials can also be vapor-deposited as electrodes as required.
[0020] (2) Prepare a saturated solution of β-cyclodextrin in a water bath at 90° C., and stir it with magnetic force for 30 minutes to obtain a completely dissolved aqueous solution of β-cyclodextrin. Coat the β-cyclodextrin film layer on the electrode area by the spin coating method, absorb the above-mentioned β-cyclodextrin aqueous solution with a straw, and drop it on the electrode area of the quartz crystal oscillator, and the dripping speed is 1ml / min. Place the above-mentioned quartz...
Embodiment 2
[0024] Embodiment 2: The quartz crystal oscillator sensor modified by selective adsorption of the metal film of the present invention is obtained according to the following method:
[0025] (1) The quartz wafer is placed in an evaporation machine, and the metal film layer electrodes (2) and (3) are plated by a mask method. According to requirements, silver is selected as the electrode film material.
[0026] (2) Prepare a saturated solution of β-cyclodextrin in a water bath at 70° C., and stir it by magnetic force for 30 minutes to obtain a completely dissolved aqueous solution of β-cyclodextrin. The β-cyclodextrin film layer was coated on the electrode area by dipping and pulling method, and the pulling speed was 1.5 cm / min. Put the above-mentioned quartz crystal vibrating plate horizontally into a closed desiccator, and then cool and dry naturally to form 1 μm β-cyclodextrin film layers (4) and (5) on the surface of the electrode area of the quartz crystal vibrating plate...
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Abstract
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