A Rain Sensor Structure Combining Piezoresistive Sensitivity and Capacitance Sensitivity

Abstract

The invention discloses a piezoresistance sensitivity and capacitance sensitivity combined rain sensor structure, which comprises a substrate with a hollow structure, wherein a lower capacitance electrode plate is arranged in the middle of the substrate, and the left and right ends of the lower capacitance electrode plate are respectively connected with the substrate through elastic beams; the roots of two structural layers are fixed on the substrate through insulating layers to form elastic cantilever beams, and the free ends of the structural layers are suspended above the elastic beams at the corresponding side, and the lower capacitance plate; piezoresistances are arranged at the root position areas on the upper surfaces of the structural layers, and the tail ends of the free ends are provided with upper capacitance electrodes; a lug structure is arranged at the center of the upper surface of the lower electrode plate, penetrates through a gap between the two structural layers, and is higher than the two structural layers, and the structural layers and the lug structure are adhered to a protective layer above through an elastic adhesive; an upper capacitance electrode and a lower capacitance electrode form a capacitance sensitive mechanism, and the piezoresistances form a piezoresistance sensitive structure. The device structure has the characteristics of small size, low power consumption, few effects on environmental factors, low rainfall, high sensitivity and the like.

Description

technical field [0001] The invention relates to a structure of a dual-sensitive rain sensor, in particular to a rain sensor structure realized by adopting MEMS technology and combining two sensitive measurement methods of piezoresistance and capacitance. Background technique [0002] Rainfall sensors have important applications in meteorological monitoring and early warning of precipitation disasters. The traditional rain sensor is commonly used as a tipping bucket rain gauge. Its principle mainly depends on the mechanical structure. Although the cost is low and the power consumption is small, the mechanical structure is easy to wear and maintenance is troublesome. With the advancement of science and technology, some new types of rain gauges such as raindrop spectrometers and rain gauges sensitive to physical quantities such as light and sound have been developed. The raindrop spectrometer can measure the size, speed and distribution of raindrops more accurately, but there ...

AI Technical Summary

Problems solved by technology

The raindrop spectrometer can measure the size, speed and distribution of raindrops more accurately, but there are measurement errors caused by overlapping raindrops and the problem of being easily affected by environmental noise; while the sound and light rain gauges have no moving parts, but are easily affected by wind and rain. The effect of dust particles in the air

The rain gauge designed and manufactured using MEMS technology has outstanding advantages in terms of intelligence, low cost, and anti-environmental interference, but it is difficult to maintain measurement accuracy when the rainfall increases from small to small.

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