Integrated lamp device and method used for producing integrated lamp device
A technology of equipment and filament, which is applied in the field of manufacturing the integrated lamp equipment, and can solve problems such as damage to the filament protection sleeve
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[0044] Hereinafter, embodiments of the present invention will be described in more detail with reference to the accompanying drawings. However, this invention may be embodied in different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. In the drawings, like reference numerals denote like elements.
[0045] image 3 A cross-sectional view for explaining a rapid thermal processing apparatus to which a heating block according to an exemplary embodiment is applied.
[0046] The processing chamber 200 has an inner space, which is a heat treatment space in which a substrate is heat treated, and the substrate is positioned in the heat treatment space. The processing chamber 200 is manufactured in an empty and sealed rectangular container shape, but is not limited thereto, and it...
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