Integrated lamp device and method for manufacturing the same
A technology of equipment and filament, which is applied in the field of manufacturing the integrated lamp equipment, can solve the problems of damage of the filament protection sleeve and the like
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[0044] Hereinafter, embodiments of the present invention will be described in more detail with reference to the accompanying drawings. The present invention may, however, be embodied in different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. In the figures, like reference numerals denote like elements.
[0045] image 3 A cross-sectional view for illustrating a rapid thermal processing apparatus to which a heating block according to an exemplary embodiment is applied.
[0046] The processing chamber 200 has an inner space, which is a thermal processing space in which a substrate is thermally processed, and the substrate is positioned in the thermal processing space. The process chamber 200 is fabricated in the shape of an empty and sealed rectangular container, but is n...
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