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Ultrasonic sensor and manufacturing method thereof

A sensor, ultrasonic technology, applied in the manufacture/assembly of piezoelectric/electrostrictive devices, piezoelectric/electrostrictive/magnetostrictive devices, electrical components, etc., can solve the problems of surface tension film touch accuracy decline and so on , to achieve the effect of increasing the sensing accuracy

Inactive Publication Date: 2015-06-03
INTERFACE TECH CHENGDU CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Ultrasonic sensors generally include a transparent electrode layer for transmitting and receiving voltage, and a piezoelectric material layer for generating ultrasonic waves. The first electrode of the transparent electrode layer and the piezoelectric material layer are connected by a conductive film in the edge area of ​​the ultrasonic sensor. When coating the conductive film, due to the high surface tension of the piezoelectric material, the edge of the film is chipped and the touch accuracy is reduced

Method used

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  • Ultrasonic sensor and manufacturing method thereof
  • Ultrasonic sensor and manufacturing method thereof
  • Ultrasonic sensor and manufacturing method thereof

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Embodiment Construction

[0018] Please refer to figure 1 , figure 2 and image 3 , figure 1 Is a top view of the ultrasonic sensor 100 of the present invention, figure 2 figure 1 A three-dimensional schematic diagram of the structure of one side of the ultrasonic sensor 100 is shown. image 3 It is a schematic cross-sectional view of the ultrasonic sensor 100 along the line III-III. The ultrasonic sensor 100 includes a first piezoelectric material layer 10, a first electrode 11, a first colloidal layer 12, a substrate 13, a second colloidal layer 14, a second electrode 15, a second piezoelectric material layer 16 and The conductive film 17 for connecting the first electrode 11 and the first piezoelectric material layer 10. The first electrode 11 is attached to one side of the substrate 13 through the first colloidal layer 12. The second electrode 15 is attached to the opposite side of the substrate 13 through the second colloidal layer 14. In this embodiment, the first gel layer 12 and the second ge...

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Abstract

The invention discloses an ultrasonic sensor which comprises a substrate, wherein a first electrode and a first piezoelectric material layer are stacked on one side of the substrate; a second electrode and a second piezoelectric material layer are stacked on the other side of the substrate; a gap is formed in the first piezoelectric material layer, so that a conductive film is coated to connect the first electrode with the first piezoelectric material layer. The invention further discloses a manufacturing method for the ultrasonic sensor.

Description

Technical field [0001] The invention relates to an ultrasonic sensor and a manufacturing method of the ultrasonic sensor. Background technique [0002] Material wave sensing elements that use piezoelectric films and other materials as piezoelectric materials have been widely used in different fields such as industry, national defense, fire protection, and electronics. A typical material wave sensing element is an ultrasonic sensor. Among them, ultrasonic sensors are widely used in harsh environments such as public places because of their operability, which is not easily affected by ambient temperature and humidity, and has the characteristics of long life and high resolution. An ultrasonic sensor generally includes a transparent electrode layer for transmitting and receiving voltage, and a piezoelectric material layer for generating ultrasonic waves. The first electrode of the transparent electrode layer and the piezoelectric material layer are connected by a conductive film at ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L41/113H01L41/277H10N30/30H10N30/40H10N30/057H10N30/06H10N30/87
CPCH10N30/878H10N30/302H10N30/06
Inventor 王娟
Owner INTERFACE TECH CHENGDU CO LTD