Gravity compensation device
A technology of gravity compensation and piston, which is applied in the direction of photolithography exposure device, microlithography exposure equipment, etc., can solve the problem of large horizontal stiffness and achieve the effect of low stiffness
Active Publication Date: 2015-06-10
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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[0007] The invention provides a gravity compensation device to overcome the problem of relatively large horizontal stiffness of the gravity compensation device in the prior art
Method used
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[0023] In order to make the above objects, features and advantages of the present invention more comprehensible, specific implementations of the present invention will be described in detail below in conjunction with the accompanying drawings. It should be noted that all the drawings of the present invention are in simplified form and use inaccurate scales, and are only used to facilitate and clearly assist the purpose of illustrating the embodiments of the present invention.
[0024] Such as Figure 1~2 As shown, the gravity compensation device provided by the present invention is used to support the micro-movement stage of the workpiece stage and the mask stage in the lithography machine, including: a base 100, a piston 200, a sheath 300, a pendulum mechanism 500, an airbag structure 600 and a load Plate 400; wherein, the base 100 is provided with an air chamber 110 for supporting the piston 200 at the top of the air chamber 110; the sheath 300 is sleeved on the piston 200 a...
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Abstract
The invention discloses a gravity compensation device for supporting a micropositioner of a workpiece stage and a mask stage in a lithography machine. The gravity compensation device comprises a base, a piston, a sheath, a swinging mechanism, an air bag structure and a load board, wherein an air chamber is arranged in the base for supporting the piston positioned at the top part of the air chamber; the sheath is arranged on the piston in a sleeving manner and is in rigid connection with the base; the air bag structure is connected between the piston and the sheath and is connected with the swinging mechanism in series; and the swinging mechanism is connected between the load board and the piston. According to the gravity compensation device, the swinging mechanism is additionally arranged between the load board and the piston, the gravity loaded on the load board is transmitted to the piston by the swinging mechanism; the rigidity of two serially connected springs is less than that of any one of spring according to the spring series-connection principle, the swinging mechanism and the air bag structure are interconnected, and low rigidity of the gravity compensation device in vertical and horizontal directions can be achieved.
Description
technical field [0001] The invention relates to the field of integrated circuit manufacturing, in particular to a gravity compensation device. Background technique [0002] In the lithography machine, the micro-motion table of the workpiece table and the mask table is supported by a low-rigidity gravity compensation device, which can avoid the severe heat caused by the motor support, and at the same time isolate the vibration transmitted to the micro-motion table, and improve the micro-motion table. positioning accuracy. [0003] At present, a micro-motion stage supported by a capsule gravity compensation device is adopted, which includes: an air chamber, a piston, a support plate and a pneumatic valve, wherein the air chamber is used to support the piston, and the support plate is used to The micro-motion table is supported, located above the piston, and fixedly connected with the piston; the pneumatic valve communicates with the first air chamber to adjust the air pressur...
Claims
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Inventor 廖飞红戴乐薇朱岳彬
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD