Microscope lens and microscope system provided with the same

Abstract

The invention provides a microscope lens. The microscope is provided with an eye lens end and an objective lens end, wherein the central axis of the eye lends end intersects with the central axis of the objective lens end, the microscope lens further comprises a reflective mirror which is arranged between the eye lens end and the objective lens end, and an incident ray and / or an emergent ray is reflected by the reflective mirror between the eye lens end and the objective lens end to be incident and / or emergent. Meanwhile, the invention further provides a microscope system provided with the microscope lens. Through the microscope lens and the microscope system, the observation and recognition of defects of an observed object (such as a glass substrate) can be improved, and therefore the accuracy of the yield can be improved.

Description

technical field [0001] The invention relates to the field of optical microscopy technology, in particular to a microscope lens used for all-round analysis and observation of defects of observed objects in the array substrate maintenance process in the TFT-LCD field and a microscope system including the microscope lens. Background technique [0002] In the field of TFT-LCD, the microscope system in the existing array substrate maintenance equipment is usually used to analyze and observe the planar image information (such as defect) of the observed object (such as glass substrate). Specifically, such as figure 1 As shown, in the existing microscope system, the incident light L1 is perpendicular to the stage 1 and enters the surface of the observed object 3 through the microscope lens 2, while the reflected light L2 is reflected from the surface of the observed object 3 and passes through the microscope lens 2 again. , so as to enter a camera (not shown) to display image infor...

AI Technical Summary

Problems solved by technology

However, through the above-mentioned observation and analysis system and method, only the plane image information of the observed object (such as a glass substrate) can be obtained, but other information such as its height and shape cannot be obtained, so that it is impossible to clearly and comprehensively identify the Defects can easily lead to misjudgment or over-judgment, which will affect the accurate statistics of yield rate

What's more, it will seriously affect the subsequent process equipment and technology

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