Method and device for monitoring etching solution
A technology of etching potion and monitoring information, which is applied in the direction of program control, electrical program control, comprehensive factory control, etc. It can solve the problem that the etching addition system does not have a visual display of the real-time status of the system, the stability adjustment of the control system, and the inability to etch and add system stability feedback And other issues
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[0021] In order to make the objectives, technical solutions, and advantages of the present invention clearer, the following further describes the present invention in detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention, but not to limit the present invention.
[0022] figure 1 It is an implementation flowchart of an etching solution monitoring method provided by an embodiment of the present invention, and the details are as follows:
[0023] In step S101, monitoring information during the adding process of the etching solution is acquired, where the monitoring information includes process parameters;
[0024] Among them, the main control board of etching addition control sends an acquisition request for acquiring monitoring information during the etching potion addition process to the lower computer, so that after receiving the acquisition request, the...
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